Gas flow rate control FOUP nitrogen purge flow control Helping to reduce adjustment work! Product name Process sensor Digital mass flow controller Process and equipment name Front-end processes, Load port Current Situation Current Issues Star tup flow rate must be adjusted to prevent swirl of particles. When there is an equipment error, an engineer has to investigate the cause and then make a replacement / adjustment. It is hard to create a program in the host device to fine-tune the N2 flow rate startup characteristics. Changing of flow rate control parameters and monitoring of flow rate are done through a host device. Problem 2 Particles (dust and dirt) Not only pinpointing the cause of an error, but even detecting the error is difficult because neither alarms nor flow rate are displayed for the mass flow. Problem 3 Changing the mass flow rate parameters and adjusting the flow rate can’t proceed until the host device is debugged, etc. Load Port

Our mass flow controller can adjust the startup characteristics of the N2 flow rate With the SP ramp of MQV_ _ _ _ models, you can specify the flow rate change rate per second. Our mass flow controller’s self-diagnostic function identifies and displays errors Parameters can be set without using any other device The self-diagnostic function aids locating investigation by identifying and displaying many different error states. The mass flow controller allows you to setspecify parameters easily using the display and keys. In addition, the PC loader can be used to save parameters to a file and to...