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Two-Axis Fast Steering Mirrors

Two-Axis Fast Steering Mirrors
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The Fast Steering Mirror (FSM) from Axsys Technologies is a flexure-mounted system offering a compact, low-cost, high-performance solution for single and multi-axis optical scanning and beam stabilization applications. The design of the FSM incorporates a mirror mounted to a flexure support system that may be tilted to direct a laser beam or other light source. A set of actuators, such as voice coils or piezoelectric devices, are used to provide the directional motion. The system can operate in open-loop or closed- loop mode. For closed-loop operation, integrated high- speed precision sensors are used to provide a complete feedback control system. The modular design allows flexibility in mirror substrate choice, aperture size, degrees of tilt, and control electronics to match the performance to your design criteria. Axsys Technologies has delivered successful FSM systems for ground-based, airborne, and space applications. Additional applications range from semiconductor inspection to laser-based machining. 25 mm Aluminum, Beryllium, SiC, glass UV to IR coatings available up to 20Ѱ optical (10Ѱ mechanical) 10 -radian > 350 Hz 50 -radian DSP-based digital servo Digital/analog user interface Advanced algorithms for high bandwidth Integrated position sensor PC-based diagnostics and signal monitoring > AXSYS TECHNOLOGIES IMAGING SYSTEMS 2909 WATERVIEW DRIVE ROCHESTER HILLS, MI 48309 PHONE: 248 293 2900 FAX: 248 293 2968 http://www.axsys.com/ size="-2">

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