Overview: The document describes a dual-axis laser interferometer system used for precision measurement, incorporating multiple interferometer/receiver units, beam splitters, and laser sources.

1. System Components

• HeNe Laser Sources: Multiple Helium-Neon laser sources provide coherent light for the interferometer system.
• Beam Splitters: Various beam splitters with different splitting ratios (50/50 and 66/33) are used to divide and direct laser beams within the system.
• Remote Interferometer/Receivers: These units receive and process the interfered beams remotely, allowing flexible system configuration.
• Beam Bender: Used to redirect the laser beam path as required.
• Optical Fiber Beam Delivery: Optical fibers are employed to deliver laser beams efficiently to different parts of the system.
• Fixed Plane Mirrors and Moving Stage: The system includes fixed mirrors and a moving stage to facilitate precise measurement of displacement or position.

2. System Configurations

• X-Y Stage System: A configuration where the interferometer measures displacement along X and Y axes.
• X-Y Stage System with Yaw Correction: An enhanced setup that includes yaw correction to compensate for rotational errors during stage movement.
• Stationary Mirrors with Stage-Carried Interferometers: A configuration where interferometers are mounted on the moving stage, and mirrors remain fixed, enabling accurate position tracking.

3. Key Features and Functionality

• The use of dual-axis interferometry allows simultaneous measurement along two perpendicular directions, improving accuracy and efficiency.
• Beam splitters with specific ratios optimize the distribution of laser power for interference and detection.
• Remote interferometer/receiver units provide flexibility in system layout and reduce mechanical constraints.
• Incorporation of optical fibers enhances beam delivery stability and alignment.
• Yaw correction mechanisms improve measurement precision by compensating for angular deviations.

4. Manufacturer Information

The system is provided by AXSYS Imaging Systems, located in Rochester Hills, MI, with contact details including phone and fax numbers and a website for further information.