digital microscope

Product catalog summary

Overview: Axsys Technologies offers a dual field of view, fully automated digital microscope designed for wafer and solar cell inspection. The system integrates illumination, dual cameras, active position feedback, and a controller to enhance throughput and resolution.

Key Features:

Dual field of view cameras for wide and narrow fields, enabling quick target acquisition and high-resolution examination.
Integrated illumination and active position feedback for precise operation.
High bandwidth capabilities for increased system throughput.

System Specifications:

Parcentricity: ≤10 micron
Parfocality: ≤20 micron
Operational Bandwidth: >200 Hz
Optical Resolution (FOV1): ≤1.6 micron
Z-Axis Actuator Range: 3 mm
Vertical Precision: 2 micron
Autofocus Capture Range: 1000 micron
Laser Detector Wavelength: 785 nm
Weight: 5.6 kg (12.5 lbs)
Overall Dimensions: 15” X 9” X 4.5”

Customization and Compliance:

Cleanroom compatibility and electronics interface are customer specified.
Specifications are subject to change based on technological advancements.
Export is regulated by US Government regulations.

Catalog excerpts

Parcentricity 10 micronIlumination Wavelength 500 nmParfocality 20 micronOperational Bandwidth >200 HzOptical Resolution (FOV1)* 1.6 micronPosition Output Analog Z-Axis Actuator Range 3 mmCleanroom Compatible Customer SpecifiedVertical Precision* 2 micronElectronitcs Interface Customer SpecifiedAutofocus Capture Range* 1000 micronWeight 5.6 kg (12.5 lbs)Laser Detector Wavelength 785 nmOverall Dimensions 15Ҕ X 9 X 4.5Ԕ > Manufacturer reserves the right to change specifications to reflect latest changes in technology and improvements at any time without notice. Export is subject to US Government regulations. size="-1">

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