Catalogs >
Axetris AG >
MEMS Services

MEMS Services
2Pages

Catalog excerpts

MEMS Services ww.axetris.com We offer custom solutions to OEM manufacturers ranging from concept to full scale volume manufacturing. Our facilities include a class 100 clean room environment, lithography and thin film processing. Our high standard of quality control is ensured by a suite of metrological systems and the use of modern statistical methods which underpin all of our production processes. As an ISO 9001:2008 certified company, we ensure the highest level of quality at a consistent level. Axetris standard capabilities Photolithography Photolithography of 1 µm for up to 8“ wafers Single or double sided alignment Thick resist processing (SU8, others) Spray coating on severe topographies Axetris special capabilities Micro-optics Thin membranes Anisotropic Silicon etching Glass etching Metal etching Dielectric coating deposition Silicon oxides and nitrides by PECVD Oxides or nitrides by reactive sputtering T hin dielectric membranes for optics, sensors and life science applications CMOS wafers post processing Refractive and diffractive micro-optical elements C MOS post processing like back side openings, metallization, thin film deposition Lift-Off Processes M etallization in connection with lift off processes for electrode formation or solder pad definition. Materials include Au, Pt, AuSn, Cr, Ni, Ta, TiW, Cu, Al, other materials upon request • Dicing of Silicon, glass & fused silica wafers Dicing • of chips with fragile structures such as thin Fused Silica Silicon Silicon Nitride / Oxide Photoresist Interferometric and tactile surface measurements Film thickness measurement Resistivity & resistance Optical microscopy Scanning electron microscopy (SEM) membranes and micro-optic structures

Open the catalog to page 1

About Axetris AG Axetris AG, a company of the Leister group, is serving OEM customers with micro-optical components used in telecom and industrial applications, and micro-technology based (MEMS) infrared light sources, laser gas sensors, mass flow sensors and controllers. Axetris is ISO 9001 certified and ISO TS 16949 compliant and operates its own 6” to 8” wafer MEMS foundry in Central Switzerland for its own products and external customers. Axetris supports its customers in many industries with in-depth application know-how. Our engineering and manufacturing teams combine broad experience...

Open the catalog to page 2