Mass Flow Meters, Controllers and Manifolds
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axetris Company of the Leister Group

High-performance gas flow control for OEMs

Axetris offers OEM Mass Flow Meters (MFM), Controllers (MFC) and Manifolds for gases of outstanding value to the customer. The proprietary platinum-based MEMS-based thermal mass flow technology guarantees excellent accuracy and repeatability in combination with high speed and an unmatched dynamic range. The advantages of the unique technology, combined with smart software processing and robust packaging, make Axetris Mass Flow Devices an ideal choice for demanding OEM applications. The Axetris mass flow technology is used by many leading companies in the field of gas chromatography, leak...

Complete range From ultra compact mass flow meters and controllers for gases, to highly integrated, customized manifold units for measuring and controlling multiple gases, the latest Axetris MFM / MFC 2000 product range is suited for a wide range of applications. Best-in-class repeatability and reproducibility MEMS-based thermal mass flow technology, combined with innovative electronic design, delivers best-in-class repeatability and reproducibility, eliminating the need for re-calibration, while enabling negligible instrument drift and excellent long-term stability. High accuracy and quick...

Mass Flow Devices for OEM Applications Analytical Instruments Gas flow control in sampling systems Gas Chromatography Sample injection and carrier gas control Mass Spectrometry Collision cell gas flow control Elemental Analysis Combustion and detection control “The excellent dynamic range helped us reduce MFC variants and build more flexible instruments” “Extremely low pressure drops for our leak testing solutions” Leak Testing Air or helium-based leak testing systems Bioreactors and Fermentors Gas concentration control in biological processes “Very reproducible results; no need for regular...

OEM modules for system integration MFM 2020: A compact mass flow meter with a digital interface and 0...5 V analog output. Its small size makes it the ideal choice when space is a limitation. In addition, it is the ideal product to build customized, multi-channel gas metering units. MFM 2021: This advanced mass flow meter includes an additional high precision PID controller with analog output, enabling direct, fast and accurate control of gas flows. MFC 2022: A compact mass flow controller created by integrating a fast-acting valve and the driver electronics of the MFM 2021. It is the ideal...

Mass Flow Meters, Controllers and Manifolds Meters Note: Typical pictures are shown only. For the actual design variant and availability contact Axetris. Customized gas manifolds - available as gas mixing or splitting systems By integrating several mass flow meters, a pressure sensor and controller modules into one common manifold, Axetris can build highly compact, customer-specific systems to precisely meet your needs. In contrast to conventional manifolds using standard mass flow controllers, an integrated manifold can be built in a more compact and cost-effective way. Axetris – A Company...

Advantages • MEMS technology →→Benefit from state-of-the-art thermal mass flow technology The entire MFM / MFC product range, based on Axetris’ proprietary mass flow sensor chip, is designed and manufactured in our class 100 cleanroom facilities in Switzerland. →→Tailor-made to suit OEM needs From OEM mass flow meters and controllers up to complex gas handling systems, the modular concept of Axetris products ensures that you receive the product functionality you need. • Excellent accuracy and repeatability • Miniature size →→Achieve highest system performance The platinum-based MEMS thermal...

• Unmatched dynamic range • Quick reaction time →→Build flexibility into your design Axetris mass flow devices achieve a dynamic range upwards of 1000:1. This means flexibility over a wide flow range, and reduced complexity because of a lower number of mass flow device variants required. →→Achieve tight process control Lightning-fast response - a flow sensor t90 of below 4 ms, and a MFC settling time of 150 ms - means you can control flow even under variable process conditions. Reference Flow (sccm) Dynamic Range Setpoint (sccm) Unmatched dynamic range of better than 1000:1 means instrument...

The Axetris thermal mass flow sensor chip is the building block for mass flow devices that deliver highest performance

Technical data and specifications are subject to change without prior notice. 1. Standard full scales available with nitrogen calibration - for other full scales, please contact Axetris. FS. : FuI1 Scale 2. Typical values only. For detailed specifications for all variants, consult the product datasheet or contact Axetris. °.R. : Of Reading 3. For MFCs the maximum operating pressure depends on the valve type. Contact Axetris for more details. Axetris - A Company of the Leister Group

About Axetris AG Axetris serves OEM customers with micro-optical components, micro technology-based (MEMS) infrared light sources, mass flow meters and controllers, and laser gas detection modules used in industrial, telecom, environmental, medical, analytical and automotive applications. Our multi-disciplinary and highly skilled engineering and manufacturing teams combine broad experience in design, manufacturing and metrology from MEMS components to advanced optical and electronic sensor modules. Axetris supports its customers with in-depth application know-how. Customers benefit from...