Mass Flow Meters, Controllers and Manifolds
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Mass Flow Meters, Controllers and Manifolds Available with: Swiss made

Analytical Instrumentation Thin Film Processes Industrial Leak Testing The Axetris thermal mass flow sensor chip is the building block for devices that deliver highest performance in a range of OEM applications. High-performance gas flow control for OEMs

Axetris offers OEM Mass Flow Meters (MFM), Controllers (MFC) and Manifolds for gases of outstanding value to the customer. The platinum-based MEMS-based thermal mass flow technology guarantees excellent accuracy and repeatability in combination with high speed and an unmatched dynamic range. The advantages of the unique technology, combined with smart software processing and robust packaging, make Axetris Mass Flow Devices an ideal choice for demanding OEM applications. The Axetris mass flow technology is used by many leading companies in the field of gas chromatography, leak testing,...

MEMS-based Thermal Mass Flow Technology Complete range From ultra compact mass flow meters and controllers for gases, to highly integrated, customized manifold units for measuring and controlling multiple gases, the latest Axetris MFM  MFC /  2000 product range is suited for a wide range of applications. Best-in-class repeatability and reproducibility MEMS-based thermal mass flow technology, combined with innovative electronic design, delivers best-in-class repeatability and reproducibility, eliminating the need for re-calibration, while enabling negligible instrument drift and excellent...

Specifications Technical Data Gas Calibration conditions Standard cubic centimeter per minute Standard Gases Optional Gases sccm N2, O2, Air, Ar, CO2, He, H2 up to 8 gas calibration curves on one device SF6, C4F8, CF4, CHF3, CH4, C2H6, C3H8, N2O etc. Reference conditions: t = 0°C, P = 1013 mbar absolute Optionally, user-defined standard conditions (uccm) are available on request +/- 0.2 % F.S. +/- 1 % O.R. (whichever is greater) +/- 0.5 % F.S. +/- 2 % O.R. (whichever is greater) +/- 0.015 % F.S. +/- 0.15 % O.R. (whichever is greater) 4 ms Response time Operating conditions Settling time...

Standard Product Range For a complete list of product variants, contact Axetris. Valve override MFM 2021 MFM 2221 OEM Meter with bidirectional measurement

Mass Flow Meters, Controllers and Manifolds Meters MFC 2100 Series with integrated shut-off valve Note: Typical pictures are shown only. For the actual design variant and availability contact Axetris. Customized gas manifolds – available as gas mixing or splitting systems By integrating several mass flow meters, a pressure sensor and controller modules into one common manifold, Axetris can build highly compact, customer-specific systems to precisely meet your needs. In contrast to conventional manifolds using standard mass flow controllers, an integrated manifold can be built in a more...

Advantages • MEMS technology J Benefit from state-of-the-art thermal mass flow technology The entire MFM / MFC product range, based on Axetris’ proprietary mass flow sensor chip, is designed and manufactured in our class 100 cleanroom facilities in Switzerland. J Tailor-made to suit OEM needs From OEM mass flow meters and controllers up to complex gas handling systems, the modular concept of Axetris products ensures that you receive the product functionality you need. • Excellent accuracy and repeatability • Miniature size J Achieve highest system performance The platinum-based MEMS thermal...

• Unmatched dynamic range • Quick reaction time J Build flexibility into your design Axetris mass flow devices achieve a dynamic range upwards of 1000:1. This means flexibility over a wide flow range, and reduced complexity because of a lower number of mass flow device variants required. J Achieve tight process control Lightning-fast response – a flow sensor t90 of below 4  ms, and a MFC settling time of 150  – means you can control ms flow even under variable process conditions. Reference Flow (sccm) Dynamic Range Setpoint (sccm) Unmatched dynamic range of better than 1000:1 means...

Mass Flow Devices for OEM Applications Analytical Instruments Gas flow control in sampling systems Gas Chromatography Sample injection and carrier gas control Mass Spectrometry Collision cell gas flow control Elemental Analysis Combustion and detection control “The excellent dynamic range helped us reduce MFC variants and build more flexible instruments” “Extremely low pressure drops for our leak testing solutions” Leak Testing Air or helium-based leak testing systems Bioreactors and Fermentors Gas concentration control in biological processes “Very reproducible results; no need for regular...

Gas Type (s): __________ Full Scale (s): __________ Operating Pressure: Inlet ____ Outlet ____ Switched to:  Analog  Digital DEVICE M: Meter C: Controller ELECTRONIC CONNECTOR Y: D-Sub 9-pin W: RJ45 (Ethernet) HOUSING / DIGITAL LEVEL 0: No Housing + TTL digital 1: Housing + EIA digital 2: No Housing + EIA digital INTERFACE FLOW CONNECTION BLOCK S: Sideport 9/16-18 SAE T: Downport 9/16-18 SAE A: Sideport 9/16-18 SAE L=3" 1: 6-4mm Tube OD 2: 1/8" Tube OD 3: 1/4*" Tube OD 7: ¼" VCR A: 1/8" VCR 4: 1/4" Tube OD 5: 6-4mm Tube OD 6: 1/16" Tube OD 8: 8-6mm (Plastic Tube) 9: 6-4mm (Plastic Tube)...

About Axetris AG Axetris serves OEM customers with micro-optical components, micro technology-based (MEMS) infrared light sources, mass flow meters and controllers, and laser gas detection modules used in industrial, telecom, environmental, medical, analytical and automotive applications. Our multi-disciplinary and highly skilled engineering and manufacturing teams combine broad experience in design, manufacturing and metrology from MEMS components to advanced optical and electronic sensor modules. Axetris supports its customers with indepth application know-how. Customers benefit from...