Mass Flow Meter modules MFM 2000 and MFM 2200 series
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Product Datasheet Mass Flow Meter modules MFM 2000 and MFM 2200 series High Performance Gas Flow Control for OEMs Figure 1 Axetris offers a wide range of mass flow meter modules based on its in-house platinum-based MEMS technology for outstanding mass flow performance. The MFM 2000 series comes with a variety of options for mechanical and electronical interfaces, and are tailored to the needs of its OEM customers. Axetris offers OEM Mass Flow Meter Modules (MFM) for gases with outstanding value to the customer. The Platinum based MEMS chip technology guarantees excellent stability and repeatability over the whole flow range. The high speed of the MEMS technology combined with smart software processing along with rigid and robust packaging makes the MFM 2000 and 2200 series an ideal choice for demanding applications. Portable applications benefit from the ultracompact size, low weight and economical power consumption. All MFM 2000 and 2200 modules support digital communication for configuration, and to read values. The Axetris mass flow technology is used by many major companies in the field of Gas Chromatography, Leak testing, Thermal Analytics, Mass Spectroscopy, Thin Film Deposition, Plasma Engineering and more. Platinum-based MEMS technology High accuracy and stability Unmatched dynamic range Excellent zero point stability Ultra-fast response time and settling time Excellent repeatability and reproducibility Ultra-compact size Robust packaging with metal flow channel Flow range zooming (optional)

Figure 2 The Axetris platinum-based MEMS chip guarantees excellent stability, repeatability and quick response time over the complete flow range Exceptional long term stability Digitally calibrated Full temperature compensation (0 to 50°C) Multi-gas/range capability, up to 8 calibration curves Anemometric measurement principle High Precision PID controller (MFM 2021) Various digital and analog I/O provided Various optional flow interfaces RoHS 2011/65/EU compliant NIST traceable calibration Gas chromatography Thermal analysis Mass spectroscopy Leak testing Thin-Film process control Plasma...

. • ® axetris Company of the Leister Group 2 Type Overview The MFM 2000 and 2200 series of mass flow meter is available with four different electronic interfaces (Table 1.) The MFM 2020 is the most economical solution and is recommended for direct connection to microprocessors with typical wiring lengths below 30 cm. As a variant the MFM 2021 includes a PID controller. With an additional driver circuit the MFM 2021 can directly control a proportional valve or a pump. For medium wiring distances the MFM 2222 is recommended and if you need to address several devices on a single line the MFM...

3 Block Diagrams 3.1 MFM 2020 and MFM 2200 series Gas flow meter (Analog/Digital) Gas flow Out Data & command (Digital I/O) EEPROM Parameters Calibration Data Sensor Chip Heater regulation Figure 3 Block diagram of the MFM 2020 and the MFM 2200 series Gas flow Out Set point (Analog/Digital) Valve override (Analog/Digital) Data & command (Digital I/O) Valve Driver (customer) PID_out Gas flow meter (Analog/Digital) uP T Compensation Linearization EEPROM Parameters Calibration Data Sensor Chip Heater regulation Figure 4 Block diagram of the MFM 2021

- • ® axetris Company of the Leister Group 4 Hardware and Flow Performance specifications Note: The specification defines typical values for MFMs calibrated with Nitrogen (N2) without connection blocks. Optimal digital noise filter (k-factor) settings are assumed. For specific questions, e.g. other gases and conditions or higher accuracy, contact Axetris. Test Conditions: Temperature 25 °C, input pressure Pin 4 bara (absolute), vertical mounting position, digital output. 4.1 Gas flow Standard full scales available with N2 calibration; For other full scales, please contact Axetris. Note:...

Parameter Unit Value / Range Humidity %RH 0.95, non-condensing conditions Storage temperature_°C_-20.80_ 4.3 Electrical characteristics Parameter Unit Value / Range Voltage supply DC Nominal V Current supply DC, typical mA Start-up time s Warm-up time Deviation < ±0.1% F.S. s For optimum accuracy min Analog output Resistive loads kQ Capacitive loads pF Valve override, set point input PID and gas flow output

4.4 Communication interfaceParameter Unit Value / Range RS-232 TTL RS-232 EIA RS-485 half-duplex RS-485 full-duplex Communication interface hardware MFM 2020/ MFM 2021 MFM 2220 MFM 2240 MFM 2250 Digital input Set point dig. Valve override dig. Channel selection dig. External offset zeroing_ Digital output Gas flow dig. Temperature dig. MFM 2021 only Analog Input Set-point Valve override1 2 3 4 Cut off limit 0...10000dec (0 to 100% F.S.) 0...655354 Individual traceability, Serial number 0.5 0 / 5 (close / fully open in purge mode) 1% F.S. (active on request at factory level)...

5 User interface pin assignment MFM 2020/2021 Table 2 Pin assignment MFM 2020 and 2021, connector type JST-SM09B-SR MFM 2222, MFM 2242, MFM 2252, connector type Micromatch 8-pole

6 Mechanical characteristics 6.1 Dimensions and weights Type MFM 202X – A/B/C MFM 202X – D MFM 22X0 – A/B/C MFM 22X0 – D Unit / Range Size Weight Size Weight Size Weight Size Weight 6.2 Flow channel and wetted materials Parameter Value / Range Flow channel Aluminum channel Aluminum, Silicon, Silicon nitride, Gold, Silicon die-attach, Epoxy, 1.4301-X5CrNi18-10 (MFM 2xxx-D) TM Viton None, an external inlet filter (5-200 μm) is recommended See mechanical interface Wetted materials Inlet filter Fluidic connections 6.3 Mechanical interface For mounting the module to a gas block, Axetris...

A number of standard flow connection blocks (with sideports or downports) are available with Axetris. These flow connection blocks are supplied mounted and leak tested with the mass flow device. The flow connection blocks are compatible with standard fluidic connectors (e.g. from Swagelok™). The main flow connection blocks are listed here - for a complete list, discuss your exact requirements with your Axetris sales contact: Flow Connection Block (with female winding) lnterface type Sideport / Downport Sideport Sideport Downport Sideport Available Fluidic Connectors (Fittings) 6-4 mm...