Mass Flow Meter MFM 2100 and Mass Flow Controller MFC 2100 series
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LASER GAS DETECTION axetris@axetris.com www.axetris.com axetris Company of the Leister Group MICRO-OPTICS INFRARED SOURCES Product Datasheet Mass Flow Meter MFM 2100 Mass Flow Controller MFC 2100 series High Performance Gas Flow Control for OEMs 1 Introduction Axetris offers Mass Flow Meters and Controllers (MFMs/MFCs) for gases with outstanding value to the customer. Proprietary platinum-based MEMS technology, measurement accuracy and highest level in quality production make the MFM 2100 / MFC 2100 the ideal choice for your applications. MFM 2100 series are standalone mass flow meters with both digital and analog output interface. Its exceptional characteristics, i.e. accuracy and response time, make it the first choice when high performance is required. MFC 2100 are standalone mass flow controller including an additional high precision PID controller together with a fast acting solenoid valve. Digital and/or analog input / output enable direct, fast and accurate control of the gas flow. The additional valve override functionality allows an immediate setting of the valve to the fully open/closed position or any value in-between. Compared to conventional mass flow meters and controllers, Axetris products offer a smaller size, higher accuracy, a faster response time and a much higher dynamic range. Key Customer Advantages • Platinum-based MEMS technology • High accuracy and stability • Unmatched dynamic range • Excellent zero point stability • Ultra-fast response time and settling time • Excellent repeatability and reproducibility • Ultra-compact size • Robust packaging with metal flow channel • Flow range zooming (optional)

Additional features • Exceptional long term stability • Digitally calibrated • Full temperature compensation 0 to 50°C • Multi-gas/range capability, up to 8 calibration curves are supported • Anemometric measurement principle • High Precision PID controller • Various digital and analog outputs 0...5 V, 0...20 mA, RS-232 TTL, RS-232 EIA, RS-485 half duplex, RS-485 full duplex • RoHS 2011/65/EU compliant • NIST traceable calibration • Gas chromatography • Thermal analysis • Mass spectroscopy • Leak testing • Thin-Film process control • Plasma engineering • Gas blender/Gas...

2 Type Overview The MFM 2100 and MFC 2100 series of mass flow meter and controller is available with four different electronic interfaces (Table 1.): RS-232 combined with 0…5 V analog, RS-232 combined with 4…20 mA analog and RS-485 half- and full duplex. RS-485 supports multi point connection and allows the direct addressing of multiple devices with one single line. These types support also the longest connection length because the differential mode offered by RS-485. Meter Type Controller Type Recommended application Digital communication single point system – medium line distances up to...

3 Block Diagrams 3.1 MFM 2100 series mass flow meter Gas flow meter (Analog/Digital) Gas flow Out Data & command (Digital I/O) EEPROM Parameters Calibration Data Sensor Chip Heater regulation Figure 3: Block diagram of the MFM 2100 series mass flow meter 3.2 MFC 2100 series mass flow controller PID_out (Analog/Digital) Set point (Analog/Digital) Valve override (Analog/Digital) Data & command (Digital I/O) uP T Compensation Linearization EEPROM Parameters Calibration Data Valve Driver Sensor Chip Gas flow meter (Analog/Digital) Heater regulation Figure 4: Block diagram of the MFC 2100 series...

4 Hardware and Flow Performance specifications 4.1 Mass Flow Meter 21xx Note: The specification defines typical values for MFMs calibrated with Nitrogen (N2) without connection blocks. Optimal digital noise filter (k-factor) settings are assumed. For specific questions, e.g. other gases and conditions or higher accuracy, contact Axetris. Test Conditions: Temperature 25 °C, input pressure Pin 4 bara (absolute), vertical mounting position, digital output. Standard full scales available with N2 calibration; For other full scales, please contact Axetris. Note: Flow Channel selection may differ...

4.2 Mass Flow Controller 21xx Note: The specification defines typical values for MFCs calibrated with Nitrogen (N2) without connection blocks. Optimal digital noise filter (k-factor) settings are assumed. For specific questions, e.g. other gases and conditions or higher accuracy, contact Axetris. Test Conditions: Temperature 25 °C, input pressure Pin 4 bara (absolute), outlet: atmospheric pressure, vertical mounting position, digital output. Standard full scales available with N2 calibration; For other full scales, please contact Axetris. Note: Flow Channel selection may differ for other...

4.3 Environmental conditionsParameter Unit Value / Range Operating temperature °C 0...50 Operating ext. humidity %RH 0.95, non condensing conditions Valve override, set point input Gas flow output_ Unit Value / Range Voltage supply DC Nominal V Ripple mV Current supply DC, typical MFM 2100 series mA Max. current supply DC MFC 2100 series mA Start-up time s Warm-up time Deviation < ±0.1%F.S. s For optimum accuracy min Analog output Resistive loads kQ Capacitive loads nF Overload protection 24 + 10% < + 50 < 50 < 150 < 200 3 15 15 > 2 < 100 DC...

4.5 Communication interface Parameter Communication interface hardware MFM 2120 / MFC 2122 MFM 2130 / MFC 2132 MFM 2140 / MFC 2142 MFM 2150 / MFC 2152 1 Digital input Set point (MFC) Valve override (MFC) 3 Channel selection External offset zeroing1 2 3 4 5 Cut off limit Digital output Gas flow 5 Temperature Device number_ MFM 2120 and MFC 2122 1 Analog input Set point (MFC) Valve override (MFC) Analog output Gas flow_ MFM 2130 and MFC 2132 1 Analog input Set point (MFC) Valve override(MFC) Analog output Gas flow Unit Value / Range - Specific protocol dig. 1% F.S. (active on request at...