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Mass Flow Controllers now available with EtherCAT and PROFINET Interfaces
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Mass Flow Controllers now available with EtherCAT and PROFINET Interfaces - 1

Company of the Leister Group www.axetris.com/mfd Mass Flow Meters Mass Flow Controllers Mass Flow Controllers now available with EtherCAT and PROFINET Interfaces Open. Efficient. Easy to implement. Industrial interfaces allow you to easily combine the power of MEMS-based thermal mass flow technology with your EtherCAT or PROFI-NET network. ,® Your Applications Our Strengths • Thin Film Processes • Physical Vapor Deposition (PVD) • Chemical Vapor Deposition (CVD) • Etching • Plasma Generation and Cleaning • Ultrafast Reaction Time • Compact Size • Unmatched Dynamic Flow Range • Outstanding Long-Term Reproducibility • Multi-Gas Capability Advantages PROFINET® and EtherCAT® RS232 RS485 devices Flexible network topology No No Yes Yes (line topology) Transmission speed 57.6 kBit/s 12 Mbit/s 100 Mbit/s Scalable to > 100 Mbit/s Standardized Protocol No No Yes Yes Real-time communication No No Yes Yes Read more about PROFINET (www.profibus.com) and EtherCAT (www.ethercat.org).

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Mass Flow Controllers now available with EtherCAT and PROFINET Interfaces - 2

axetris Company of the Leister Group Axetris AG, a company of the Leister group, is serving OEM customers with micro technology based (MEMS) infrared light sources, laser gas sensors, mass flow sensors and controllers and micro-optical components used in industrial, process control, environmental, medical automotive and telecom applications. Axetris supports its customers in many industries with in-depth application know-how. Our engineering and manufacturing teams combine broad experience in simulation, design, manufacturing and metrology from microchip level to advanced electronic...

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