Built-in needle valve model Flow adjustable needle valve and sensor are integrated into one unit. Fuss-free plumbing and minimized installation space are realized. Panel mount is possible. Bracket for panel mount is available. Sensor as well as built-in needle valve sensor can be panel mounted. Since coherent installation is possible, one large panel cut make possible for mounting multiple sensors with minimum space and process. Coherent installation is possible Dual display / 2 color indication feature Introduction of main and sub display improve operability. Additionally, 2 colors indication...

Quick response time, Max. 50msec. High-speed response is realized by incorporating a platinum sensor chip processed with silicon micromachining. It contributes to shorten takt time. Bidirectional flow measurement is possible. Bidirectional flow model can measure the flow of preset direction. Flexibility of the plumbing installation improves and usable for reverse flow detection. Free installing orientation The sensor can be mounted in any orientation: top, bottom, left, or right. No straight piping requires The newly proposed rectifying structure eliminates the need for a straight piping section...

4 h b n ©I© © © ©.Flow sensor ©.Output type ©Please be sure to read before handling the product. Please refer to "safety instructions", "common safety instructions for products listed in this manual", "common safety instrutfions to flow controller'' from page 24 through 3

Parts materials are subject to change without notice. ,/f\, Please be sure to read before handling the product. Please refer to "safety instructions", "common safety instructions for products listed in this manual", "common safety instrutfions to flow controller'’ from page 24 through 35. 1. Please refer to construction of no needle valve model for the main sensor parts. *2. Stainless steel for FUS20---005/010/020 *3. PTFE for FUS20--005/010/020

,4\ Please be sure to read before handling the product. Please refer to "safety instructions", "common safety instructions for products listed in this manual", "common safety instrutfions to flow controller" from

*1. Converted to volumetric flow at 20°C and 1 atmospheric pressure (101 kPa) *2. Displayed flow rate less than approx. ±1% F.S is rounded down (zero adjusted). *3. Accumulated flow rate is a calculated reference value and reset when shut down. *4. When flowing compressed air, please use a clean air conforming to JIS B8392-1:2003 Grade 1.1.1 ~ 1.6.2. Please install a filter (filtering rate: 5pm), an air dryer (minimum pressure dew-point: max 10°C) and an oil mist filter (max oil content: 0.1 mg/m3) onto the primary side (upstream) of the sensor since the compressed air from the compressor contains...

H Outer dimensions by fitting size Built-in needle valveModel : FUS2Q-HH-HH-HHHN H Outer dimensions by fitting size Zl\.Please be sure to read before handling the product. Please refer to "safety instructions", "common safety instructions for products listed in this manual", "common safety insertions to flow controller" from page 24 through 35.

*. 2 fixing screws M3x 0.5 (length 6mm) are included ,/f\, Please be sure to read before handling the product. Please refer to "safety instructions", "common safety instructions for products listed in this manual", "common safety instrutfions to flow controller'’ from page 24 through 35. 9

No needle valve model with panel mounting kit option 78 71 61 Panel stopper Panel holder cover Outer dimensions by fitting size ø8 Fitting size Panel holder Built-in needle valve model with panel mounting kit option 95 88 78 Single installation Panel stopper Panel holder cover Fitting size Outer dimensions by fitting size Panel holder Please be sure to read before handling the product. Please refer to "safety instructions", "common safety instructions for products listed in this manual",

<Using CH2 as SW output> <Using CH2 as external input> /!\ Please be sure to read before handling the product. Please refer to "safety Instructions", "common safety instructions for products listed In this manual", "common safety Instructions for flow controller' from page 24 through 35.

Analog output property Voltage output type: one-way flow direction Current output type: one-way flow direction 20 analog output (mA) Voltage output type: bidirectional flow direction Current output type: bidirectional flow direction 20 analog output (mA) F.S. flow rate （l/min） flow rate （l/min） flow rate （l/min） flow rate （l/min） flow rate *. Bidirectional model can be switched to one-way directional output by setting the button. Please be sure to read before handling the product. Please refer to "safety instructions", "common safety instructions for products listed in this manual", "common safety...

flow rate (l/min) flow rate (l/min) flow rate (l/min) flow rate (l/min) 2 1 0 flow rate (l/min) flow rate (l/min) flow rate (l/min) flow rate (l/min) flow rate (l/min) A Please be sure to read before handling the product. Please refer to "safety instructions", "common safety instructions for products listed in this manual", "common safety instrutfions to flow controller'’ from page 24 through 35. 13

number of needle rotation number of needle rotation number of needle rotation Zl\,Please be sure to read before handling the product. Please refer to "safety instructions", "common safety instructions for products listed in this manual", "common safety insertions to flow controller" from page 24 through 35.

Operation method Display/operating section names and functions Main display (green/red) Flow rate unit display (green) Output (OUT1) display (green) Output (OUT2) display (green) ・Display set value and flow rate ・Display color can be changed. ・Display upper 3 digits during accumulated flow rate display ・Display flow rate unit ・Illuminate when CH1 output is ON ・Flash when over current is detected. ・Illuminate when CH2 output is ON ・Flash when over current is detected. (UP) key ・Sequentially displays the CH1 data when the flow rate is displayed. ・Display the maximum value during peak hold operation...