WITTENSTEIN Group FPS Sensors Real-Time Interferometric Displacement Analysis (c) 2018, attocube systems AG - Germany. attocube systems and the logo are trademarks of attocube systems AG. Registered and/or otherwise protected in various countries where attocube systems products are sold or distributed. Other brands and names are the property of their respective owners. attocube systems AG | Königinstrasse 11a | D - 80539 München | Germany Tel.: +49 89 2877 809 - 0 | Fax: +49 89 2877 809 - 19 | [email protected] www.attocube.com Brochure version: 2018 - 01 WITTENSTEIN Group

product overview attocube's innovative optical displacement sensors surpass the performance of other presently available devices in terms of precision, speed, and compactness. The patented fiber-based, interferometric measurement principle offers unrivalled accuracy and stability, while the compact design enables strikingly simple adjustment even in spatially confined setups. Fiber-based sensor heads enable the operation in extreme environments, such as ultra high vacuum, cryogenictemperatures, or even hard radiation. Two product lines have been established and adapted to perfectly meet existing...

attoSENSORICS technical terms highest accuracy over long distances Attocube’s interferometers have been tested by the National Metrology Institute of Germany (PTB). The accuracy of the interferometers has been confirmed at various pressure, humidity and temperature conditions over several days, thus also confirming the high performance and reliability of attocube’s ECU (environmental compensation unit). Fabry-Pérot Interferometer The fiber-based design allows flexible alignment, thus making multiaxis measurements and large distances of fiber length (even covering kilometer long distances) an...

FPS Sensor Systems – Key Features FPS Sensors plug&play sensing for R&D-setups The global trend towards miniaturization causes major challenges for advanced metrology: quality standards are increasing, requirements on accuracy and reliability are constantly rising, and failure tolerances in production processes are steadily reduced. Especially in applications such as quality assurance and research & development, instruments need to provide highest precision, while offering versatile implementation options and the immediate availability of data post-processing, analysis, and storage. With its...

Sensor Head Overview IDS & FPS The IDS and FPS can be operated with different sensor heads: ultra compact heads for the most confined spaces or alternative designs where priority is given to easy alignment or to the compatibility with various target materials (glass, aluminum, ceramic, etc.). M12/C7.6* Ø 14 mm, length 43.9 mm Large working distances Calibration of machine axes and tools Easy alignment and installation/assembly Plug&Play for various applications High angular tolerance Standard for various appplications Small sensor head mounting For space-limited applications High reflective target...

FPS3010 & FPS1010 table-top displacement sensing attocube’s FPS3010/1010 is a fully automated interferometric displacement measurement system, compatible with up to three fiber-based sensor heads. TheFPS3010/1010 combines state of the art hardware with innovative software concepts, offering real-time data processing and storage, Fast-Fourier signal analysis for vibrometry applications, environmental index of refraction compensation (optional), and many other measurement options such as angular measurement software or customized trigger functionality. The flexible, FPGA-based architecture allows...

FPS sensors are designed for ease of use and simple connectivity. Measured displacement information can be transferred to a personal computer using USB or Ethernet (optional), where the measurement software Daisy allows synchronous data visualization, analysis, and storage. In addition to these standard interfaces, the FPS includes the high-speed real-time digital interfaces AquadB and HSSL. The completely new PC-based software of the attocube FPS sensor system not only enables simple data recording. Instead, it offers a ton of features making complex measurements simple - ranging from easy-to-use...

Selected Applications Selected Applications Measuring Brownian Motion of Commercial Micro-Cantilevers Measuring Water Surface Displacements The resolution capability of the IDS was demonstrated by measuring the Brownian motion of micro cantilevers. Measuring the tiny vibrations of objects excited only by its thermal energy is typically challenging the resolution capabilities of a measurement system. The cantilever was placed on attocube positioners and measured with the focusing sensor head (D12/F2.8). This sensor head has a shot diameter of smaller 2 μm. The figure clearly shows an individual...

Selected Measurements unsurpassed signal stability Selected Measurementsreal-time vibrometry measurements -■-■-1-1-■-■-*-1-1-1-’-P-1- Measured Long-Term Signal Stability ” \ Long-term FPS signal stability as demonstrated on a 20 mm long Titanium vacuum reference cavity. The cavity is cooled to liquid helium temperature (-269 °C) in order to minimize thermal expansion/contraction. 68% of all position measurement data points lie within 286pm, as measured at a 100 Hz bandwidth over 12 hrs. Short-term data are recorded at 10 Hz over 10 seconds. V. Vibrometry measurements as performed on a piezoelectric...

Sensor Head Specifications IDS & FPS Sensor Heads product name Modes of Operation optics type focal length fiber glued connector working environment short distance and wide angle exemplary applications lower surface quality broad variety of applications easy to mount and easy to align long distances and working ranges vibrometrie and profilometrie of various geometrical shapes deformation monitoring of work pieces during manufacturing concentricity tests, detection of imbalances monitoring and diagnostics of machine tools components calibration and synchronization of large-scale machine tools...