Catalog excerpts
Flow Controller for CMP Slurry Fast and accurate flow control reduces waste Ultrasonic Technology generates precision Straight flow path prevents slurry clogging Dymatrix™ Pinch Valve provides long life Falconics™ Technology Specifications Flow Ranges Asahi’s patented Ultrasonic Flow Meter Technology and Dymatrix™ Pinch Valves make Falconics™ the ultimate choice for flow control of CMP slurry. Our Ultrasonic Technology creates a directionally concentrated and repeatable flow signal despite bubbles and temperature fluctuations. Asahi’s proven Dymatrix™ Pinch Valve offers the most durable and reliable valve for aggressive slurry. Together these features provide highly accurate control and fast response times, which generates a strong ROI. Operating Pressure Flush Pressure* Medium Temp. Electric Pinch Valve Current Draw Output Signals Signal Connection Purge Flow Rate Purge Connector Ultrasonic Flowmeter *Unit should not be operating to set point during flush mode. Flow Characteristics Falconics stabilizes much faster than competitive flow controllers No overshoot eliminates slurry waste Please contact us to discuss all our exciting performance data 35 Green Street, Malden, MA 02148 • Tel: (781) 321-5409 www.asahi-america.com • asahi@asahi-america.com Rev. 01/12
Open the catalog to page 1
PLC / Signal Com Port Process Media Outlet Service Com Port Process Media Inlet Ordering Info The following models have 1/4” Flare connections. Additional configurations are available. It is recommended that customers order at least one Calibration Kit (sold separately). The kit includes the Falconics™ Calibration Software, RS485 to USB converter and extension communication cable. This kit allows the customer to connect to the “Service Com Port” for calibration and troubleshooting from their computer. Flow Range Temperature Control Falconics™ Calibration Software The Falconics™ Calibration...
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