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PERFREZ-SMART Sealing

PERFREZ-SMART Sealing
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PERFREZ-SMART Sealing

Product catalog summary
Introduction to ASNA
ASNA (Applied Seals N.A. Inc.) is a specialized facility in Fremont, CA, focusing on semiconductor-grade elastomer seals. They provide advanced sealing solutions for semiconductor processes, addressing challenges like harsh chemicals and high temperatures.

Sealing Products and Material Science
ASNA offers high-tech sealing solutions made from advanced compounds, ensuring long and stable operations. They emphasize technological innovation for future sealing solutions.

Process and Applications
ASNA's seals are designed for applications such as thin film processes, thermal applications, and wet cleaning, offering excellent chemical and thermal resistance.

Features and Benefits of ASNA Materials
ASNA materials are optimized for longevity, ultra-high purity, and plasma resistance, performing well in high-temperature applications and withstanding higher sealing loads.

SMARTSeal PRISM OneKit® and QuikVU® Clamp
The SMARTSeal PRISM OneKit® is a versatile seal system for SubFab applications, reducing maintenance time with a customizable color-coding system. The QuikVU® Clamp enhances application compatibility with constant torque.

ASNA BKM® Guide
The ASNA BKM® Guide offers methodologies to optimize sealing performance in SubFab applications, addressing issues like improper installation and over-torque.

Engineering Methodology
ASNA provides comprehensive design, prototyping, production, testing, and installation services, investigating seal failures to recommend materials and design upgrades.

Specifications and Recommendations
- Emphasizes optimizing O-ring size nomenclature for enhanced performance and life expectancy.
- Offers installation assistance through on-site and remote video tutorials.
- Suggests conducting O-ring/seal audits and groove size evaluations for custom designs.
- Uses SolidWorks® and ABAQUS for CAD and FEA to ensure optimal stress distribution and material longevity.

Finite Element Analysis (FEA)
FEA is crucial for design analysis, aiding in stress and deformation analysis to enhance seal functionality and extend elastomer part life.

ASNA SMART Sealing® and ACE® Tool
The ACE® tool ensures optimal conditions for materials, offering design validation and customization options, enhancing productivity and seal reliability.

PERFREZ® Elastomers
Various PERFREZ® compounds are designed for specific applications, such as handling aggressive chemicals and high temperatures, with examples like PERFREZ® XL15 and PERFREZ® 6022.

Case Studies
Case studies illustrate the performance of PERFREZ® materials, highlighting their resistance to chemical attack and extended seal life.

Technical Compounds Table
A table provides information on the service temperature and chemical compatibility of various compounds.

Conclusion
The document underscores the importance of selecting the right sealing materials and designs for reliability and performance in semiconductor manufacturing environments.

Introduction to PERFREZ® Materials
The document analyzes PERFREZ® sealing materials, focusing on compounds like PERFREZ® 5033, 6022, and XL12, with case studies and performance comparisons.

Material Specifications
Details on PERFREZ® 5033, 6022, and XL12, highlighting their suitability for specific applications and performance benefits.

Performance Comparison
Compares PERFREZ® materials against incumbents, showing superior seal force retention and reduced degradation.

Applications
PERFREZ® compounds are used in static and dynamic applications, including seals and fittings.

Technical Data
Provides detailed technical data for each compound, including polymer type and service temperature.

Case Study: Etch Process
Focuses on PERFREZ® 5033's economic and performance benefits over incumbent materials.

Finite Element Analysis (FEA)
FEA results show PERFREZ® designs reduce seal surface area subject to plasma strike.

Global Presence
ASNA has a global presence with offices in multiple countries.

Contact Information
Contact ASNA at their Fremont headquarters or visit their website.
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Catalog excerpts

PERFREZ-SMART Sealing-1

SMART Sealing® SEALING SOLUTIONS Start Here - Bonded Gates - PRISM OneKit® - ASNA BKM®

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SMART Sealing® ow ASNA SEALING PRODUCTS Our semiconductor grade elastomer high-tech sealing solutions in the global market. don’t just provide a product, provide technical support to performance optimization. operations before TECHNOLOGICAL INNOVATION We develop tomorrow’s sealing solutions today.

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Table of Contents Welcome to ASNA Process & Applications Features & Benefits of ASNA Materials EIS SMARTSeal PRISM Onekit® and QuikVU® Clamp NW / ISO Fittings O-Rings Sizes S70) Sa) ASNA BKM® (Best Known Successful Sealing Solutions: Engineering Methodology SS aeNU)S8) ASNA Calculated Engineering (ACE®) PERFREZ® Elastomers Technical Compounds Table Information Case Studies Case Study: Ultra High Purity Applications Case Study: Foreline NW Fittings Case Study: RPC Manifold Case Study: Heater and Gas Feed Seals Case Study: XL Series® Data in Direct Plasma Exposure Case Study: PERFREZ® Series Data...

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PERFREZ-SMART Sealing-5

Welcome To ASNA ASNA N.A. Inc.) is a full service, application support facility located This site, along with the global offices that operate under its umbrella, offers the service and support imperative to handle semiconductor engineering global requirements. laboratory offers complete solutions to address the demands that requires unique, often daunting challenges on all aspects of sealing applications. At ASNA, know that harsh seal performance high temperature require optimal Sealing® solutions are created to enable the most advanced sealing expertise possible in the global market. We take...

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processing and maximizing of advanced productivity. Applied Seals Co. Ltd. provides the next generation call Semiconductor, Pharmaceutical as well as LED. All of our production processes are tightly controlled. seals for highly demanding packaging within environments and Class 100 packaging that includes strict adherence to cleaning metal contaminants as well as organics. This facility delivers the most reliable sealing with short lead times that have often critical. Our products are proven to maintain harsh solutions at the best possible cost of ownership the difference high-integrity seals...

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Thin Film + Dry Etch Thin Film, such traditional seals might compounds thermal generation chemical temperatures. break Thermal Applications ASNA compounds are tailored to specific thermal applications and maintain integrity at elevated temperatures often found Oxidation, Diffusion, Annealing, and RTP. Wet Cleaning + BCD ASNA compounds for wet cleaning are highly engineered for static, dynamic and bonded applications that require minimal metallic ion contamination.

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Features & Benefits of ASNA Materials - Designed for optimal lifetime * Ultra-high purity - Excellent plasma resistance - Outstanding physical properties + Withstands higher sealing loads - Excellent performance in high temperature applications High Performance O-Rings ASNA fas 4 greal deal of experiance manufacturing 2 full range of standard O-ring sizes including: AS568A, IIS series, and Metric sizes. Qur in-house tool makers have extensive éxperierce In fabricating AIGA PrecisiGn Standdrd and custom Mods with a short response time to Meet the most demanding applications. ASNA’s highly integrated...

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PERFREZ-SMART Sealing-9

The outstanding performance of ASNA products are built upon extensive field knowledge, in-depth material science, and sealing design expertise. Our experience coupled with a comprehensive product offering includes sealing solutions for abatement systems and forelines that offer advantages in the following: + Optimal compound + Compound based on chemistries and temperature attributes that offer a higher sealing retention force and resiliency * Special shapes and sealing size recommendations to improve performance + Improved compound mechanical strength + Sealing consistency and reliability * Excellent...

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PERFREZ-SMART Sealing-10

SMARTSeal PRISM OneKit® and QuikVU® Clamp Universal Vacuum Fitting Clamp with Torque Control Patent No.: US 11,187,358 B2 Clamp Optional Versatile, Fully Asembled, Color-coded SubFab Seal System - Affordable without compromise + Clean room assembled > Resilient to high temperatures » Withstands amplified energies & aggressive gases - Performs reliably, durably and consistently - Eliminates common * Fully assembled causes of premature failure kit reduces maintenance time * Customizable color-coding system identifies seal assignment

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Introducing SMARTSeal PRISM Why reinvent the seal? It is widely known that, for SUbFab applications, traditional FFKM seals, while great performers, are Applied Seals’ new SmartSeal PRISM Onekit® yields not cost effective. Neither are filler-diluted FFKMs, Unparalleled performance specialty cross-sections, re-engineered entering Expressly designed for SubFab manufacturing economies and rings or custom shaped exceptionally resilient to extreme operating temperatures, glands. These approaches to SubFab sealing performance limit supply options, across every SubFab application. Onekit® handles more...

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NW / ISO Fittings O-Rings Sizes NW / ISO METRIC SIZE

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(Best Known ASNA also offers Method) Guides guide for NW/ISO fittings and clamps in SUbFab applications, to further enhance the success with practical purpose in mind. Education and experience are the foundational pillars of this quide to assure methodologies found in the sub-fab world. created to perform functions that were mandated years ago. originally created for non-FFKM In each cited case, options have been ISO standards are included materials, they fail to address the extremely important nuances of newer sealing materials (especially FFKM’s). Issues such as improper installation, over-torque,...

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Successful Sealing Solutions: Engineering Methodology Seal Solutions from Design, Prototyping, Production, Test, and Installation ASNA experienced engineering design team offers comprehensive product design and performance optimization and analysis services. A failed seal often has several reasons that cause it to fail such as thermal degradation, mechanical degradation, plasma chemical attack, and inherent design flaws. Our team of ASNA engineers will investigate all of these possibilities and provide assistance in material recommendations and design upgrades along with tutorial education. Our...

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.