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Semiconductor industry: Measurement of Automatic Supply Systems with Laser Trackers

Semiconductor industry: Measurement of Automatic Supply Systems with Laser Trackers
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Semiconductor industry: Measurement of Automatic Supply Systems with Laser Trackers - 1

Laser based measurements in Semiconductor Industry

Semiconductor industry: Measurement of Automatic Supply Systems with Laser Trackers - 2

Application Story: Semiconductor Industry Illustration: ASYS Measurement of Automatic Supply Systems with Laser Trackers ASYS Automatic Systems GmbH & Co. KG in Schorndorf develops handling systems for the semiconductor industry and micro-structure technology. These robots, which are intended for vacuum and clean room applications, are designed and produced by ASYS, and are either offered as stand-alone or complete supply systems, including the necessary vacuum chambers. They are characteristic of this key industrial area. The ubiquitous semiconductor, without which no electronic product...

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Semiconductor industry: Measurement of Automatic Supply Systems with Laser Trackers - 3

Application Story: Semiconductor Industry which would disrupt the extremely sensitive customer processes. The same is true for almost all other chemicals. Even the heat management plays a specific role, because a vacuum chamber behaves like a well-insulated thermos flask, and it’s not too easy to remove the heat, which can be a real problem for mechanical and chemical processes. The drive technology, and ultimately the metrology, are also faced with great challenges by the almost airless space; the drive technology because the mechanical drives are located outside the vacuum, and all the...

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Semiconductor industry: Measurement of Automatic Supply Systems with Laser Trackers - 4

Application Story: Semiconductor Industry Breakthrough with laser trackers The real breakthrough came with the use of laser trackers, with whose help it was for the first time possible to qualify 200 spatial measurement points within a reasonable time. These 200 entries form the core of the comprehensive quality reports at ASYS, which describe the spatial 3D behaviour of the robot statically and dynamically. This is concerned with profiles that will be recorded and that describe the measured deviations in runs as a result of friction and elasticity. A laser tracker, in turn, can be set up...

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Semiconductor industry: Measurement of Automatic Supply Systems with Laser Trackers - 5

Application Story: Semiconductor Industry Future developments It is clear to see where the trend is heading ; future handling systems must be able to handle more load and achieve more range. Today’s 300 mm wafers will soon be replaced by the new 450 mm standard, which means that the diameter of the vacuum chamber, and thereby the range of the robot, will have to be increased considerably in order to move the wafer. Future robots must be even faster and, at the same time, consume less energy; all-in-all, requirements that will place even more focus on the dynamic properties of these systems....

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