EMICON
EMICON
Process control is crucial in industrial plasma applications to ensure reliability and high quality. Optical emission spectroscopy is preferred for real-time monitoring without affecting the plasma. The EMICON system is a plasma monitor system based on this technique, designed for analyzing, optimizing, and controlling plasma applications.
- Broad Band Spectrum Acquisition: The system's fiber optics spectrometers continuously acquire complete spectra from 200 to 1100 nm. The EMICON MC series supports up to 8 independent spectrometer channels for multi-chamber or spatially resolved gas flow control.
- Real-Time Monitoring: Simultaneous observation and tracking of plasma emissions allow continuous monitoring and instant realization of changes.
- Process Analysis: Full analysis is conducted by reviewing recorded spectra and process data.
- Process Optimization: Real-time monitoring enables optimization by responding instantly to parameter changes.
- Process Control: Features analog and digital inputs/outputs for open and closed-loop control functions, including integrated PID control for applications like gas flow and power control in reactive sputtering.
- Film deposition (PVD, PECVD)
- Plasma etching, end-point detection
- Reactive magnetron sputtering (control of gas flow and power)
- Quality control, fault detection, plasma process diagnostics
- EMICON MC (Multi-Channel): 1-8 channels, 200-1100 nm wavelength range, 1.4 nm spectral resolution, 16 Bit signal resolution, 4/4 digital in/out, 8 analog out, USB 2.0 connectivity.
- EMICON HR (High-Resolution): 1 channel, 200-860 nm wavelength range, 0.15 nm spectral resolution, 16 Bit signal resolution, 2/2 digital in/out, 4 analog out, USB 2.0 connectivity.
The system is fully software-controlled with one-click navigation, featuring a split-screen for maximum data overview. Special features include a recipe manager, set-point alarm, PID control with automatic response curve scaling, DLL remote control, and administrator/user mode.
A variety of optical components are available for collecting plasma radiation, with protection devices for in-vacuum optics. The optional SpecLine software package provides tools for evaluating and analyzing spectral data, essential for identifying plasma species.
Catalog excerpts
German high-quality plasma spectroscopy and software solutions PLASMA MONITOR AND PROCESS CONTROL SYSTEM BROADBAND SPECTRUM ACQUISITION - MULTI-CHANNEL AND HIGH-RESOLUTION SERIES - REAL-TIME PLASMA EMISSION MONITORING (PEM) - TURN-KEY SYSTEM FOR INDUSTRIAL APPLICATIONS
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THE EMICON SYSTEM Process control is essential in industrial plasma applications to ensure reliability and high quality of the process. Here, optical emission spectroscopy is a first choice technique since it does not affect the plasma and since real-time monitoring of several plasma species is possible. The EMICON system is a plasma monitor system (PEM) based on optical emission spectroscopy and comes with all the features you need for analyzing, optimizing and controlling your plasma application. Broad band spectrum acquisition The fiber optics spectrometers of the system acquire continuously...
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System control analogfdigital outputs Advanced system software The system is fully software controlled and all functions are available by one click navigation. The split-screen shows maximum overview of all process relevant data. Special features: recipe manager, set-point alarm, PID control with automatic response curve scaling, DLL remote control, administrator/user mode, etc.. (-\PC i Notebook EMiCON Software Optics A variety of optical components are available for collecting the plasma radiation: optical fibers, collimator optics and optical feedthroughs for ex-vacuum and in-vacuum use. All...
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For further information please contact: P L A S U S German high-quality plasma spectroscopy and software solutions PLASUS GmbH Lechstrasse 9 D-86415 Mering Germany Tel.: +49 8233 73 53 78-0 Fax: +49 8233 73 53 78-9 E-Mail: [email protected] Internet: www.plasus.de All images are copyright material and may not be reproduced without permission. Copyright 2015 PLASUS GmbH. Germany
Open the catalog to page 4All Angstrom Sciences, Inc. catalogs and technical brochures
VACUUMOPTICS2 Pages
SPECLINE2 Pages
EMICON SA2 Pages
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