German high-quality plasma spectroscopy and software solutions PLASMA MONITOR AND PROCESS CONTROL SYSTEM BROADBAND SPECTRUM ACQUISITION - MULTI-CHANNEL AND HIGH-RESOLUTION SERIES - REAL-TIME PLASMA EMISSION MONITORING (PEM) - TURN-KEY SYSTEM FOR INDUSTRIAL APPLICATIONS

THE EMICON SYSTEM Process control is essential in industrial plasma applications to ensure reliability and high quality of the process. Here, optical emission spectroscopy is a first choice technique since it does not affect the plasma and since real-time monitoring of several plasma species is possible. The EMICON system is a plasma monitor system (PEM) based on optical emission spectroscopy and comes with all the features you need for analyzing, optimizing and controlling your plasma application. Broad band spectrum acquisition The fiber optics spectrometers of the system acquire continuously...

System control analogfdigital outputs Advanced system software The system is fully software controlled and all functions are available by one click navigation. The split-screen shows maximum overview of all process relevant data. Special features: recipe manager, set-point alarm, PID control with automatic response curve scaling, DLL remote control, administrator/user mode, etc.. (-\PC i Notebook EMiCON Software Optics A variety of optical components are available for collecting the plasma radiation: optical fibers, collimator optics and optical feedthroughs for ex-vacuum and in-vacuum use. All...

For further information please contact: P L A S U S German high-quality plasma spectroscopy and software solutions PLASUS GmbH Lechstrasse 9 D-86415 Mering Germany Tel.: +49 8233 73 53 78-0 Fax: +49 8233 73 53 78-9 E-Mail: [email protected] Internet: www.plasus.de All images are copyright material and may not be reproduced without permission. Copyright 2015 PLASUS GmbH. Germany