PHE102 Spectroscopic Ellipsometer

Product catalog summary

Overview: The PhE102-VASE is a versatile and powerful variable angle spectroscopic ellipsometer designed for research on a wide range of materials including dielectrics, polymers, semiconductors, metals, and multilayers. It offers a broad spectral range and high spectral resolution, making it suitable for both academic and industrial applications.

Specifications: The system can measure film thickness from sub-nanometer to 30 micrometers and is compatible with various substrates such as metals, semiconductors, and glass. It also supports multilayer structures, surface and interfacial roughness analysis, bandgap and electronic transitions, composition, and crystallinity.

Features: The PhE102-VASE includes options for micro spot focus optics, automated sample translation, in-situ mounting hardware and software, sample heating, and liquid/electrochemical cells. It also supports mapping and 3D contouring.

Sub-Models: The ellipsometer is available in several sub-models with varying wavelength ranges, from 193 nm to 2300 nm, accommodating different research needs.

Software: The PhE Acquisition and Analysis Software provides comprehensive data acquisition and analysis capabilities. It includes a large optical constant database, push-button procedures for routine measurements, versatile data acquisition and analysis recipes, and the ability to build user-defined models. The software also offers reliability analysis of fitting parameters and supports surface and interfacial roughness analysis.

Applications: The instrument is used for nondestructive characterization of thin films and bulk materials, providing accurate measurements of film thickness and optical constants. It is suitable for both simple and complex structures, offering fast operation for multi-angle measurements and accurate wavelength selection.

Catalog excerpts

Angstrom Advanced Angstrom Advanced Inc. > Angstrom Advanced > Instruments for Thin Film and Semiconductor [email protected] www.angstromadvanced.com Copyright(C) 2007 Angstrom Adv a nced . All Rights Copy Right(C) 2007 Angstrom Advanced. All Rights Rserved. size="-5">

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PhE102-VASE is the most powerful and versatile ellipsometer for research on a wide range of materials: dielectrics, polymers, semiconductors, metals, multilayers, etc. It covers the widest spectral range with the highest spectral resolution. This system is controlled by a remote computer located in the system control module. This instrument is affordable, high quality, and used widely in both academia and industry. Accessorial Options Micro Spot Focus Optics Automated Sample Translation Hardware and software for In-situ mounting Sample Heater Liquid/Electrochemical Cells Mapping Nondestructive...

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PhE is a very comprehensive program for data acquisition and analysis. It utilizes sophisticated mathematical fitting algorithms for accurate and fast data analysis of both simple and complex structures. Own large tabulated optical constant database (materials library);Push-button procedure for measurement of routine samples;Versatile recipes for data acquisition, data analysis and mapping;Integrate normal dispersion models to describe material optical constants;Automatic backside correction/correlated layers;Include surface and interfacial roughness analysisBuild user-defined models and database...

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All Angstrom Advanced catalogs and technical brochures

Angstrom Advanced General Brochure
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PHE Variable Angle Discrete Wavelength Ellipsometer
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