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PHE Variable Angle Discrete Wavelength Ellipsometer

PHE Variable Angle Discrete Wavelength Ellipsometer
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PHE Variable Angle Discrete Wavelength Ellipsometer

Product catalog summary
Overview: The PhE-VADE is a state-of-the-art ellipsometer designed for nondestructive characterization of thin films and bulk materials. It offers high precision and fast measurement speeds, making it suitable for in-situ process monitoring and control across various substrates, including transparent, metallic, and semiconductor materials.
Key Features:
  • High signal-to-noise ratio and fast measurement speed of less than 1 second.
  • Wide variable angle range from 20 to 90 degrees for determining film thickness and optical constants.
  • Multiwavelength operation with options for wavelengths such as 470 nm, 532 nm, 543 nm, 594 nm, 612 nm, 633 nm, 1064 nm, and 1150 nm.
  • Powerful software with a comprehensive library of material optical constants and advanced data analysis capabilities.
  • High stability and reproducibility with measured angle accuracy better than 0.01 degrees.
  • Auto-focus feature to compensate for sample topography and misalignment.
Specifications:
  • Thickness range for transparent and absorbing films: 0 - 6000 nm.
  • Angle of incidence range: 20 - 90 degrees with 5-degree steps and accuracy of +/- 0.01 degrees.
  • Refractive index accuracy: 0.001.
  • Film thickness accuracy: +/- 0.005 nm for 100 nm SiO2 on silicon.
  • Measurement time: 1 second.
  • Sample stage: Wafer chuck up to 200 mm diameter with tilt and height adjustments.
  • Standard wavelength: 632.8 nm, with optional wavelengths available upon request.
Software and Analysis:
  • Integrated data acquisition and analysis software with full materials library.
  • 2D and 3D display views for data visualization.
  • Capability to simulate experimental data and provide fitting parameter values with 90% confidence.
  • Advanced features for graphic manipulation and data output functions.
Upgrade Options:
  • Micro spot analysis for sample areas smaller than 50 microns by 50 microns.
  • Mapping option for analyzing sample areas with small lateral dimensions.
See more

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.