PFLOW Series Mass Airflow Sensors Description The PFLOW series of mass airflow sen- sors incorporate the latest MEMS and microelectronics innovations. The sensor die uses a pair of thermopiles to detect changes in temperature gradient caused by mass flow, delivering ultra-low noiseto-signal, and unsurpassed repeatability. The “solid state” thermal isolation on the sensor die eliminates the need for surface cavities or fragile membranes, used in competing solutions, making the sensor resistant to clogging and pressure shock. The sensor’s internal signal conditioning circuitry leverages an off-the-shelf microcontroller, providing proven reliability and low cost. The PFLOW series of mass airflow sensors covers the ranges from 10 sccm to 2000 sccm. The sensors are fully calibrated and compensated over the tempera- ture range of 0 to 50 °C (32 to 122 °F). The linearized analog output (1 to 5 V) provides customers with maximum flexibility and ease-of-use. Bidirectional air flow versions are available upon request. Consult PEWATRON Applications Medical respirators and ventilators Patient monitoring systems Anesthesia delivery machines Nebulizers Oxygen concentrators Sleep apnea machines Ventricular assistance devices Environmental monitoring Analytical instrumentation Gas leak detection Filter monitoring and VAV systems in HVAC Process Control Features Unsurpassed performance in a robust and cost effective package High accuracy and repeatability (2% F.S. Max) Linear output and temperature compensation Long-term stability with minimal null drift “Solid state” sensing core (no surface cavity or fragile membrane), resistant to clogging and pressure shock Analog output (1 to 5 V) High sensitivity at very low flows Fast response time (1 ms) Absolute Maximum Ratings Operating Temperature: -25 °C to 85 °C Storage Temperature: -40 °C to 90 °C Humidity: 0 to 100% RH* Shock 100 g peak (5 drops, 6 axis) Common Mode Pressure 25 psi** *Sensor is resistant to water condensation *Packaging with higher common model pressure r

PFLOW Series ELECTRICAL CHARACTERISTICS Test Conditions: Vin=10±0.01VDC, Ta=25°C. Relative Humidity: 40%

PFLOW Series Linear Output Flow Rate = [(Vout - 1 V) / 4 V] x Full Scale Flow Rate For example, using the PFLOW213U-2210 below, the device has a Full Scale Flow Rate of 2000 sccm. When the Output Voltage reads 2.5V, the Flow Rate will be: [(2.5V-1V)/4V x 2000 sccm] =750 sccm 5 4.5 Flow Rate (sccm)

PFLOW Series Package Dimensions Pin-out 1 Vout 2 Vcc 3 GND Ordering Information Part Number

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