OEM Mass Flow ControllerModel PFLOW5001 / PFLOWC5001 Experts on Design-In Wl d Angst+Pfister Sensors and Power

/j\ Attention! • Please carefully read this manual prior to operating this product. • Do not open or modify any hardware which may lead to irrecoverable damage. • Do not use this product if you suspect any malfunctions or defection. • Do not use this product for corrosive media or in a strong vibration environment. • Use this product according to the specified parameters. • Only the trained or qualified personnel shall be allowed to perform product services. Use with caution! • Be cautious for electrical safety, and even it operates at a low voltage, any electrical shock might lead to some unexpected...

1. Overview This manual provides essential information for the operation of the PFLOW5001 / PFLOWC5001 series of gas mass flow sensors for general-purpose gas flow monitor and control applications with the full-scale mass flow rate from 0.2 to 20 SLPM, and both analog and digital outputs. The product performance, maintenance, and troubleshooting as well as the information for product order, technical support, and repair are also included. PFLOW5001 / PFLOWC5001 are available in the manifold configuration for the mechanical connections. Optionally they can also be offered with a manifold body...

2. Receipt / unpack of the products Upon receipt of the products, please check the packing box before dismantling the packing materials. Ensure no damages during shipping. If any abnormality is observed, please contact and notify the carrier who shipped the product and inform the distributors or sales representatives if the order is not placed directly with the manufacturer; otherwise, the manufacturer should be informed. Please refer to the return and repair section in this manual for any further actions. If the packing box is intact, proceed to open the packing box, and you shall find the product...

Data/power socket Control electronics Controller body Control valve Installation mounting port. Manifold flow ports Flow channel in/outlet Note: The manifold base port size should not be smaller than those of the flow ports on the product. Figure 3.1: PFLOW5001 / PFLOWC5001 parts description 3.2 Power and data pinout description 3.2.1 PFLOW5001 - RS232 TTL The electrical interface is a JST-SM09B-SRSS-TB connector (9 pole). Pin Definition 1 P ower, 8 ~ 2 4 Vdc 2 Power common / Ground 3 R S 2 3 2 TT L : Rx D 6 N.C. 7 Analog: Flow output 0 ~ 5 Vdc 8 N.C. 9 N.C. DO NOT connect or disconnect the cable...

3.2.2 PFLOW5001 - RS232 EIA The electrical interface is a Micromatch (8 pole). 6 Analog: Flow output 0 ~ 5 Vdc AA DO NOT connect or disconnect the cable when the external power is on!! It may damage the electronic chipsets of the product! 3.2.3 PFLOW5001 - RS485 Half-duplex The electrical interface is a Micromatch (8 pole). VoV Pin Defi n ition 1 Power, 8 ~ 24 Vdc 2 Powe r co m m on / G ro un d DO NOT connect or disconnect the cable when the external power is on!! It may damage the electronic chipsets of the product! Wl d Angst+Pfister Sensors and Power

3.2.4 PFLOW5001 - RS485 Full-duplex The electrical interface is a Micromatch (8 pole). Wt Pin Defi n ition 1 Power, 8 ~ 24 Vdc AA DO NOT connect or disconnect the cable when the external power is on!! It may damage the electronic chipsets of the product! 3.2.5 PFLOW5001 - I2C The electrical interface is a Micromatch (8 pole). 6 Analog: Flow output 0 ~ 5 Vdc DO NOT connect or disconnect the cable when the external power is on!! It may damage the electronic chipsets of the product! Wl d Angst+Pfister Sensors and Power

The electrical interface is a JST-SM09B-SRSS-TB connector (9 pole). 2 Power common / Ground 3 RS232TTL : RxD 7 Analog: Flow output 0 ~ 5 Vdc 8 Analog: Set point 0 ~ 5 Vdc 9 Analog: Valve override 0 ~ 5 Vdc DO NOT connect or disconnect the cable when the external power is on!! It may damage the electronic chipsets of the product! The electrical interface is a Micromatch (8 pole). 6 Analog: Flow output 0 ~ 5 Vdc 7 Analog: Set point 0 ~ 5 Vdc 8 Analog: Valve override 0 ~ 5 Vdc DO NOT connect or disconnect the cable when the external power is on!! It may damage the electronic chipsets of the product!...

The electrical interface is a Micromatch (8 pole). Pin Defi n ition 1 Power, 8 ~ 24 Vdc 6 Analog: Flow output 0 ~ 5 Vdc 7 Analog: Set point 0 ~ 5 Vdc 8 Analog: Valve override 0 ~ 5 Vdc AA DO NOT connect or disconnect the cable when the external power is on!! It may damage the electronic chipsets of the product! 3.2.9 PFLOWC5001 - RS485 Full-duplex The electrical interface is a Micromatch (8 pole). Pin Defi n ition 1 Power, 8 ~ 24 Vdc DO NOT connect or disconnect the cable when the external power is on!! It may damage the electronic chipsets of the product! Wl d Angst+Pfister Sensors and Power

Note: 1. Power supply: The PFLOW5001 / PFLOWC5001 requires a power supply of 8 ~ 24 Vdc (max 26 Vdc). No particular requirements for the external power supply, but standard industrial power cautions should be applied. 2. The analog outputs 0 ~ 5 Vdc correspond to the specified full-scale flow range at the time of order. If the analog option is not selected, this pin output could be NULL. 3. For PFLOWC5001 - RS232 TTL, RS232 EIA and RS485 Half-duplex, the analog valve override feature overrules all other commands. The thresholds of valve override is 0.2Vdc. 0.0 ~ 0.2 Vdc: valve close 4.8 ~ 5.0...

Figure 3.2: PFLOW5001 (up to 3 SLPM) manifold mechanical dimensions.

Figure 3.3: PFLOWC5001 (up to 7.5 SLPM) manifold mechanical dimensions.

4. Installation Do not open or alter any part of the product, which would lead to malfunction and irrecoverable damage. Please pay special attention to ESD and other electrical device handling precautions since this unit is an OEM version without external protection of the PCB etc. The system design should consider electromagnetic compatibility and related standards. Do not install this device for processes involving personal injury or other unsafe applications. Ensure the connections leakage proof and all electrical precautions are applied for the installation. Please make sure the electrical...