• Precision 6-DOF MEMS Inertial Measurement Unit • Silicon Sensing’s latest VSG3QMAX inductive gyro and capacitive accelerometer MEMS • Excellent Bias Instability and Random Walk Angular - 0.1°/hr, 0.02°/Vhr Linear - 15qg, 0.05m/s/Vhr • Non-ITAR • Compact and lightweight - 68.5 x 61.5 x 65.5H (mm), 330g • Internal power conditioning to accept 4.75V to 36V input voltage • RS422 interfaces • -40°C to +85°C operating temperature range • Sealed aluminium housing • RoHS compliant • In-house manufacture from MEMS fabrication to IMU calibration • Evaluation kit and integration resources available • First class customer technical support • Future developments and expansion capability Multi sensor MEMS blending Low power ‘sleep’ mode Additional sensor integration - GPS/ Magnetometer/Barometer North finding mode AHRS functionality Other interface protocols and specifications Custom and host application integration Applications • Hydrographic surveying • Airborne survey and mapping • INS (Inertial Navigation Systems) • AHRS (Attitude and Heading Reference System) • GPS drop-out aiding • Maritime guidance and control • GNSS (Global Navigation Satellite System) • Autonomous vehicle control and ROVs • Machine control • MEMS alternative to FOG/RLG IMUs 1 General Description DMU30 is a full six-degree-of-freedom inertial measurement unit providing precise 3-axis outputs of angular rate and acceleration, delta angle and velocity, and temperature, at 200Hz. DMU30 is the first of a new family of High Performance MEMS IMUs (HPIMU) incorporating precision VSG3QMAX high-Q inductive resonating ring gyroscopes and capacitive accelerometers. DMU30 represents a realistic, alternative to established FOG/RLG based IMUs due to its exceptional bias stability and low noise characteristics, yet it is comparatively compact, lightweight and offers low cost of ownership. Designed specifically to meet the growing demand from high-end commercial and industrial market applications for a ‘tactical’ grade non-ITAR IMU, DMU30 utilises Silicon Sensing’s class leading MEMS inertial sensors integrated and calibrated using an in-house state-of-the-art test facility. HPIMU development takes advantage of Silicon Sensing’s wide-ranging multi sensor technologies in a unique architecture to achieve a highly versatile IMU design. Future developments will feature GPS, magnetic and ambient pressure sensing, north finding and AHRS functions. © Copyright 2017 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company. Specification subject to change without notice. DMU30-01-0100-132 Rev 3 Page 1 Competitive senso

Technical Datasheet High Performance MEMS Inertial Measurement Unit (HPIMU) SILICON# SENSING. www.siliconsensing.com Power Return Tx_Hi Tx_Lo Rx_Lo Rx_Hi Temperature Sensors Wide Bandwidth High Dynamic Range Gyro X Wide Bandwidth High Dynamic Range Gyro Y Wide Bandwidth High Dynamic Range Gyro Z Figure 1.1 DMU30 Functional Block Diagram 68.5 MAX © Copyright 2017 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company. Specification subject to change without notice. Page 2 DMU30-01-0100-132 Rev...

SILICON# SENSING. www.siliconsensing.com Technical Datasheet High Performance MEMS Inertial Measurement Unit (HPIMU)2 Ordering Information Item © Copyright 2017 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company. Specification subject to change without notice. DMU30-01-0100-132 Rev 3 Page 3 Competitive sensor & power supply solutions worldwide

© Copyright 2017 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company. Specification subject to change without notice. Page 4 DMU30-01-0100-132 Rev 3 Competitive sensor & power supply solution

© Copyright 2017 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company. Specification subject to change without notice. DMU30-01-0100-132 Rev 3 Page 5 Competitive sensor & power supply solutions worldwide

© Copyright 2017 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company. Specification subject to change without notice. Page 6 DMU30-01-0100-132 Rev 3 Competitive sensor & power supply solutions worldwide

Notes: Improper handling, such as dropping onto hard surfaces, can generate every high shock levels in excess of 10,000g. The resultant stresses can cause permanent damage to the sensor. Exposure to the Absolute Maximum Ratings for extended periods may affect performance and reliability. © Copyright 2017 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company. Specification subject to change without notice. DMU30-01-0100-132 Rev 3 Page 7 Competitive sensor & power supply solutions worldwide

High Performance MEMS Inertial Measurement Unit (HPIMU) 5 Typical Performance Characteristics This section shows the typical performance of DMU30, operating from a 12V power supply. Figure 5.1 Gyro Bias Error (°/h) over Temperature Figure 5.2 Normalised Gyro Bias Error (°/h) over Temperature Figure 5.3 Gyro Scale Factor Error over Temperature Figure 5.4 Normalised Gyro Scale Factor Error over Temperature Figure 5.5 Gyro Max Non-Linearity Error (±490°/s range) over Temperature Figure 5.6 Gyro Max Non-Linearity Error (±200°/s range) over Temperature © Copyright 2017 Silicon Sensing Systems Limited....