Solid State Pressure Sensor FEATURES Robust SS housing IP 65 or Better MEMS Sensing Inside Custom Configurable As low as 125 Pa DESCRIPTION The Series 85 is a miniature and robust pressure transducer with calibrated and temperature compensated output . It incorporates MEMS sensing chip which is specially designed for low pressure application where board-mount is not applicable. Multi-order compensation for correction of offset, sensitivity, thermal errors and nonlinearity are accomplished in factory via an internal DSP running a correction algorithm with calibration coefficients stored in on-chip EEPROM. A variety of output configuration, including resolution, sampling rate, output interface are available to provide simple and readyto-use solution for a wide rage of application. Multiple chosen for pneumatic interface are suitable for system integration. Multiple choice for media compatibility are available upon request.

Temp - Operating 1 Temp - Compensated 2 Temp - Storage 1. -40 to 85 ℃ is available upon request. 2. Custom temperature compensation is available upon request. 3. Gas only, no condensation. 4. Range dependent. Refer to individual data sheet. 5. Zero stability to be tested with 120 hour hot storage at 85 ℃ , which is roughly equivalent to accelerated aging of the part for over a year at Room Temperature. 6. Measured orientation effect on the zero output of 0.15 psi sensor with a standard deviation of 0.035% Full-Scale/g. 7.The maximum deviation in output from a Best Fit Straight Line (BFSL) fitted...

1 2 1P Configuration 1P: Standard x1: Full gel coating x2: Thin-film conformal coating with Parylene x3: Gel on ASIC chip only x4: Selective gel on chips x0: No encapsulation xP: Refer to individual data sheet Type of Output A = Analog Output D = Digital Output Type of Pressure Supply G: Gauge (+P at Port B) A: Absolute (+P at Port A) D: Differential (+P at Port B) Output 2 = 0.5 to 4.5 V 4 = 4 to 20 mA 5 = 0 to 1 V 7 = 0 to 5 V 9 = 0 to 10 V S = Special A =0.5 to 4.5V, clamped B =0.2 to 4.7V, clamped I: Negative (-P at Port B, offset output when P=0) *Absolute is available only for pressure...

Type of Encapsulation Series 85, 52, 19 & 17 Thin-film conformal coating with Parylene Gel on ASIC chip only chips carrier inside of TXR Code of configuration Note: The least right 2 digits in ordering information are coded for configuration. Type of encapsulation is determined per application and sensing chip used. Sensor price varies with the encapsulation chosen. Chips stack is taken in Series 17 and only available for absolute pressure. 06-21 v1.2

Specifications – Analog Output Parameters Overall Error 6 Update Rate 1. 8 to 16V supply should be ordered separately. Other supply voltage from 2.75 to 5.5V is available upon request. 2. Continuously running measurement sequence is executed at 5V. 3. Higher resolution longer step response settling time. Dithering is available upon request and can be switched on or off. 4. VDD-ratiometric voltage. For vented gauge pressure, zero is 10%. Absolute voltage output (0/1V, 0/5V) is also available upon request. 5. Combines errors at 25℃ after reflow mounting and auto-zero. Pressure range dependent....

Mounting Bracket (excluded) Standardized M12 Circular Connector, 5 circuits

Mounting Bracket (excluded) Standardized M12 Circular Connector, 5 circuits

Clamped Analog added as “a” Clamped output code change

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