MEMS Inertial Sensors Accelerometers iSensor ® MEMS Accelerometer Subsystems MEMS Accelerometers Part Number Output Type Sensing Axes Noise (mg/√Hz ) Analog Analog Analog Analog Analog Analog Analog Analog Analog Analog Analog Analog Digital Digital Digital Digital Digital PWM PWM 100 mV/g to 1000 mV/g 27 mV/g to 55 mV/g 2.2 mV/g to 16 mV/g 100 mV/g to 1000 mV/g 312 mV/g 27 mV/g to 55 mV/g 300 mV/g 57 mV/g 300 mV/g 174 mV/g 440 mV/g 6.5 mV/g 2 mg/LSB 2.9 mg/LSB 3.9 mg/LSB 1 mg/LSB 3.9 mg/LSB 30%/g 12.5 %/g 5 mm × 5 mm × 2 mm LCC 5 mm × 5 mm × 2 mm LCC 5 mm × 5 mm × 2 mm LCC 5 mm × 5 mm × 2 mm LCC 13 mm × 8 mm × 2 mm SBDIP 5 mm × 5 mm × 2 mm LCC 4 mm × 4 mm × 1.45 mm LFCSP 4 mm × 4 mm × 1.45 mm LFCSP 3 mm × 3 mm × 1.45 mm LFCSP 4 mm × 4 mm × 1.45 mm LFCSP 4 mm × 4 mm × 1.45 mm LFCSP 3 mm × 3 mm × 1.45 mm LFCSP 3 mm × 4 mm × 1.2 mm LGA 5 mm × 5 mm × 1.45 mm LFCSP 3 mm × 5 mm × 1 mm LGA 3 mm × 3.25 mm × 1.06 mm LGA 3 mm × 3 mm × 1 mm LGA 5 mm × 5 mm × 2 mm LCC 5 mm × 5 mm × 2 mm LCC Digital Digital Digital Digital 11 (normal); 0.5 (sleep) 11 (normal); 0.14 (sleep) 11 (normal); 0.5 (sleep) 18 (normal); 0.23 (sleep) Digital Digital 12 (normal); 0.15 (sleep) 1 (normal); 0.1 (sleep) Digital Digital 43 (normal); 0.23 (sleep) 43 (normal); 0.23 (sleep) Additional Features Low noise, low tempco Ultrawide bandwidth Low noise, low tempco Ultrahigh temperature 3-axis, high-g Min/max tempco, low power, FIFO Low power, FIFO Ultralow power, deep FIFO, built in multiple sample activity/inactivity detection, external sync Low power, FIFO Low noise, low offset tempco, PWM output Low noise, low offset tempco, PWM output Internal temperature sensor Internal temperature sensor Vertical mount, tilt and acceleration outputs, programmable alarms, digital filtering Dual-mode, high accuracy (0.1°) tilt and acceleration outputs, programmable alarms, digital filtering Tilt and acceleration outputs, programmable alarms, digital filtering Tri-axis, single command frame alignment, programmable alarms, serial number and device ID Programmable event recorder, peak sample/hold Programmable event recorder, peak sample/hold Embedded FFT analysis, low noise, multiple capture modes, programmable windowing/filtering, serial number and device ID Embedded FFT analysis Gyroscopes (continues on next page) Part Number ADXRS644 Range (°/sec) Output Type BW Typ In-Run Bias (Hz) Stability (°/Hr) 1000 Angle Random Walk (°/√Hr ) Linear Acceleration Effect(°/sec/g) Bias Tempco (°/sec/°C) Sensitivity Tempco (ppm/°C) MEMS Gyroscopes (All Single Axis) Analog Analog Analog Analog Analog Analog 7 mV/°/sec 25 mV/°/sec 12.5 mV/°/sec 7 mV/°/sec 7 mV/°/sec 6 mV/°/sec For more information on ADI MEMS inertial sensors, visit our website at www.analog.com/MEMS. Additional Features Vibration immune, min/max specs across temperature range, ultralow noise Ultrahigh stability, vibration immune, min/max specs across temperature range, ultralow noise High vibration immunity, industrial grade typ specs Min/max specs across temperature range Min/max specs across temperature range Min/max specs across temperature range Industrial grade typ specs Min/max specs across temperature range High rotation rate up to 50,000°/sec, industrial grade typ specs Calibrated over temperature, vibration immune, in-plane and out-of-plane sensing High vibration immunity, industrial grade typ specs, in-plane and out-of-plane sensing

Gyroscopes (continued) iSensor MEMS Gyroscope Subsystems (All Single Axis) Part Number Range (°/sec) Output Type Linear In-Run Bias Angle Random Acceleration Stability (°/Hr) Walk (°/√Hr ) Effect (°/sec/g) Bias Tempco (°/sec/°C) Sensitivity Tempco (ppm/°C) Additional Features External clock option Wide dynamic range Range scaling Includes part specific factory calibration, programmable filtering, and digital self-test. For multiaxis solutions, see the MEMS Inertial Measurement Unit (IMU) selection table. i Sensor MEMS Inertial Measurement Units (IMUs) Range Part Number Linear In-Run Angle Bias...