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LC-D Series Residual Gas Analyzer

LC-D Series Residual Gas Analyzer
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AMETEK® PROCESS INSTRUMENTS PRODUCT DATA SHEET MEASURES: Molecular weights up to 300 AMU LC-D Series Residual Gas AnalyzerCost-effective solutions for your application-specific, process monitoring needs The Dycor LC-D Series Residual Gas Analyzer (RGA) offers outstanding performance, yet is priced to be the most cost-effective RGA on the market. The LC-D Series instruments are constructed from materials that are compatible with Ultra High Vacuum (UHV) systems and are designed to require the very minimum in maintenance. This versatile RGA is ideally suited for use with UHV systems and equipment monitoring of semiconductor and thin film processes in the high vacuum range. Coupled with the System 2000 software (32-bit, multi-threaded, and designed for use with Windows 98 through Windows 8), the LC-D provides advanced features that are associated with higher-priced instruments. The LC-D Series RGA includes Dycor's 1-100 AMU-range open ion source analyzer head with dual filaments and Faraday cup detector, electrometer preamplifier, and RF power supply with an Ethernet port for interfacing to a PC. Options include 1-200 AMU range and 1-300 AMU range, and channel plate electron multiplier. Auto tune Automatically sets RF-tune, mass position and resolution. Printing Print one, some, or all data displays. Ethernet connectivity 10/100BASE-T Ethernet - Auto-sensing. Ethernet connectivity: 10/100BASE-T Ethernet - Auto-sensing Variety of operating modes including Analog and Bar, Meter, Annunciator, Tabular, Trent, and Leak Detection Custom modes to combine display windows from other modes Data that can be viewed in real time or saved to a file for later retrieval and comparison with current spectra Auto-tune capabilities to ensure high quality, repeatable data Library mode for comparison between collected sample spectra and stored library spectra. Facilitated by split-screen display OPC, Modbus, & Dynamic Data Exchange (DDE) automation Alarms: Low, Low Warning, High Warning, High E APPLICATIONS • Vacuum diagnostics • Deposition system monitoring • Academic research ff\ KEY MARKETS • Semiconductor processing • Vacuum coating • Academic/industry R&D To find out more or request a quote visit our website ametekpi.com LC-D Series Rev 7 - F-0208.indd 1 02/08/2018 09:49

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LC-D Series Residual Gas Analyzer © 2018, by AMETEK, Inc. All rights reserved. Printed in the U.S.A. F-0208 Rev 7 (0818) One of a family of innovative process analyzer solutions from AMETEK Process PROCESS INSTRUMENTS Instruments. Specifications subject to change without notice.

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LC-D Series Residual Gas Analyzer 2Pages

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LC-D Series Residual Gas Analyzer
2Pages