AMETEK PROCESS INSTRUMENTS PRODUCT DATA SHEET 5910 UHP Moisture Analyzer Parts per trillion analysis of UHP gases The 5910 UHP moisture analyzer achieves exceptional baseline stability and sensitivity to sub-parts per billion by volume (ppbv) changes in moisture concentration, while providing one of the fastest response speeds available. The analyzer is sensitive to changes in moisture concentration of less than 500 parts per trillion by volume (pptv), resulting in accuracy of better than ±100 pptv or ±10% of the reading. Speed of response At parts per billion (ppb) levels of moisture, a carefully designed and heat-traced analyzer is required to achieve a response speed measurable in minutes instead of hours. The 5910 UHP is manufactured to produce an unmatched speed of response to changing moisture, typically reaching 80% of a 25 ppbv step change in either direction in less than ten minutes. Easy-to-use, multi-gas compatibility The 5910 UHP is compatible with virtually all non-corrosive gases including inert gases - helium (He), argon (Ar), neon (Ne), xenon (Xe), krypton (Kr) - oxygen (O2), hydrogen (H2), and nitrogen (N2). Unlike some moisture analyzers that require special sensors for certain gases, the 5910 UHP uses a sensor that is not affected by the background gas. Even H2 and O2 are simple gas streams to monitor, since quartz-crystal microbalance (QCM) sensors, unlike electrolytic sensors, do not suffer from recombination errors. Changing gases involves a simple selection from a software menu. There are no flow or pressure regulators to adjust. Internal verification The 5910 can quickly and accurately verify its zero baseline. An internal dryer creates a zero gas from the sample gas, thereby allowing verification of the analyzer's baseline. Hkey benefits • Quartz-crystal technology provides accuracy, speed, and calibration stability • Online zero gas verification confirms analytical stability • Intuitive, easy-to-use interface • Rack-mount design makes the analyzer ideal for analytical carts • Menu-driven gas selection eliminates manual adjustments E APPLICATIONS • Continuous monitoring • Analytical carts n KEY MARKETS • Semiconductor manufacturing • LCD/OLED display manufacturing • Air separation

PRODUCT DATA SHEETPERFORMANCE SPECIFICATIONS Compatible gases SALES, SERVICE & MANUFACTURING WORLDWIDE SALES AND SERVICE LOCATIONS Canada - Alberta 2876 Sunridge Way NE Calgary AB T1Y 7H9 Tel: +1 403 235 8400 Fax: +1 403 248 3550 AMETEK* PROCESS INSTRUMENTS © 2018, by AMETEK, Inc. All rights reserved. Printed in the U.S.A. F-0143 Rev 8 (0918) One of a family of innovative process analyzer solutions from AMETEK Process Instruments. Specifications subject to change without notice.