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Model 1535 Pressure Gauge for the Semiconductor

Model 1535 Pressure Gauge for the Semiconductor
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Model 1535 Pressure Gauge for the Semiconductor - 1

Model 1535 2-inch Stainless Steel Pressure Gauges for Semiconductor • Helium leak tested to conrm leakage rates of less than 10 -9 scc/sec. • All stainless steel (Type 316L) internal surfaces for corrosion resistance • Large, easy-to-read dial graduations • Handles wide variety of exotic gases • Available with welded face seal ttings, or NPT connection • Assembled and packaged in Class 100 clean room • Low mount or center back connections Specications • Size: 2 inch diameter • Case: Drawn stainless steel polished with pressure relief in back of case Description U.S. Gauge Model 1535 pressure gauges are designed and manufactured for ultrahigh-purity gas distribution equipment used in semiconductor manufacturing. These 2 inch, all stainless steel gauges are clean room produced, nitrogen purged, and double bagged in 3 mil nylon bag and 6 mil poly bag. These instruments are compatible with many toxic and corrosive gases. Welded face seal connections provide a threadless pressure seal and virtually eliminate a major source of contamination. Also available in NPT connections. The Model 1535 is available in pressure ranges from 0 to 30 inches Hg. VAC, to 0 to 4000 psi. This precision gauge incorporates rugged case construction with rear pressure relief, and a seamless Bourdon tube with welded joints for heavy-duty service. • Ring and window: One piece, threaded polycarbonate, or optional friction ring with polycarbonate or glass lens • Pointer: Aluminum, adjustable zero, black nish • Dial: Aluminum, white background with black markings • Bourdon Tube: Type 316L seamless stainless steel • Connection: Type 316L stainless steel, low mount or center back mount, male or female face seal tting, or 1/4 inch male NPT. Connectors are shipped with protective plastic caps. • Surface Finish: Face seal connections: 10RA 1/4 in. NPT connections: 32RA • Ranges: 30 in. Hg. vacuum to 4000 psi, single or dual scale, see ordering information • Overpressure: 110% of span maximum Features • Cleaning for UHP gas applications exceeding ANSI B40.1 specications • Face seal and gland connection (wetted surfaces) are electropolished and have a less than 10 Ra nish • Accuracy: ±1% of span (less than 3000 psi) ±2% of span for ranges 3000 psi and above • Scales: psi, bar, kg/cm2, KPa, MPa (single or dual scale) in Hg. (for vacuum range, compound and vacuum gauges only)

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Model 1535 Pressure Gauge for the Semiconductor - 2

Model 1535 2-inch Stainless Steel Pressure Gauges Dimensions Low Mount Center Back Mount PRESSURE RELIEF GROMMET 1.29 (32.9) METAL PRESSURE RELIEF FLAPPER Swivel Female Face Seal 0.38 (9.70) Swivel Female Face Seal Fixed Male Face Seal

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Model 1535 Pressure Gauge for the Semiconductor - 3

Model Numbering: 535 2-inch stainless steel pressure gauges 535 2-inch stainless steel pressure gauges for Pressure range Dial units IN.HG In. Hg (compound and vacuum) Process connection location CBM Center back mount Process connection type MVCR Male face seal swivel MVCRF Male face seal fixed (center back mount only) FVCR Female face seal swivel FR Friction ring, polycarbonate lens FRG Friction ring, glass lens

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Model 1535 Pressure Gauge for the Semiconductor - 4

Model 1535 2-inch Stainless Steel Pressure Gauges 4 |kJiE^PElf ® 820 Pennsylvania Boulevard* Feasterville, PA 19053 * U.S.A. ©AMETEK, Inc. All rights reserved • Printed in the U.S.A. • PDF608 (110097) K796435

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