PRODUCT BROCHURE AIRBORNE MOLECULAR CONTAMINATION CLEANROOM MONITORING OF DETRIMENTAL GASES Part-Per-Billion Detection Utilizing Gas Chromatographs and Hydrocarbon Analyzers

Airborne Molecular Contamination (AMC) can cause detrimental effects, both physically and electrically, during the production and processing of many sensitive products such as semiconductors, PCBs, and optics. AMC may result from off-gassing of volatiles or direct contact with other materials. AMETEK MOCON offers the Baseline 9100 GC to monitor for various cleanroom solvents at low levels. The Baseline 9100 GC configured for acetone and IPA is commonly used in chip manufacturers clean rooms to monitor specific AMCs. Sulfurs, ethanol, and other aromatic hydrocarbons such as BTEX can also be added...

Very low levels of hydrocarbon impurities in air can leave residue on surfaces meaning batch testing does not provide enough control or resolution to solve AMC problems as they occur. AMETEK MOCON offers the Baseline 9000 to provide continuous hydrocarbon monitoring, total or methane/non-methane, at low parts-per-billion (ppb). The 9000 Methane/Non-Methane analyzer uses a flame ionization detector (FID) in conjunction with an oxidation catalyst that oxidizes all hydrocarbons except methane. This produces a methane only measurement which is then subtracted from the total concentration to determine...

Total Volatile Organic Compounds Volatile Organic Compounds (VOC's) are potentially dangerous compounds that vaporize under normal atmospheric conditions. VOC levels are much higher in indoor environments as they can be emitted by many manufactured products such as carpet, paint, and cleaning supplies. Outdoor sources can include landfills, industry, and hydrocarbon emissions. TVOC Detection Photoionization Detectors (PIDs) are the simplest and most efficient way to detect VOC levels. Although not as selective without the use of a gas chromatography column, a standalone PID provides real-time...