vacuum bakeout oven
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vacuum bakeout oven - 1

Dual Oven - Stand Alone The SA2200 stand-alone ovens from Amada Miyachi America provide the perfect solution for adding bakeout capacity independent from an atmospheric enclosure. Manufactured to the highest standards, the ovens provide the most efficient distribution of conducted and radiant heat. • Front loading, 200°C bakeout ovens, vacuum pumps, and a cooling water recirculator are fully integrated into a single, compact fame utilizing minimal production space • Easy access front panel control- initiates preprogrammed "vacuum-backfill" bakeout process with the single push of a button • Individually controlled heaters ensure uniform distribution of heat and component consistency KEY FEATURES Front-loading 200°C heated wall ovens Built-in 12 inch deep work area: • Individual wall heater temperature controller • Allows easy parts loading and unloading in front of the ovens System Options: • Programmable vacuum-backfill bakeout schedule with up to 40 process segments • Cooling water recirculator delivers a closed-loop air-cooled circulating water to cool the oven flange preventing premature vacuum gasket wear • Safety mechanical over temperature protection ® • 3rd party Windows XP based software for creating vacuum bakeout schedules via RS-232 communication port (computer not included) • 27-inch deep wall or heated shelf ovens • 2 or 3 heated shelf ovens available in polished stainless steel or hard anodized aluminum • Rated to achieve 20 millitorr (0.026 mbar) • Digital display vacuum gauge Model 300 vacuum pumps • Dry, molecular drag or turbo vacuum pumps • Natural lubrication design oil vacuum pumps • Higher temperature heated shelf ovens available upon request • Pump speed of 6.8 cfm (9.7 m3/h) • Quick change foreline trap alumina cartridge • Integrated mist eliminator filter HERM ETIC SEALING

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vacuum bakeout oven - 2

HERM ETIC SEALING TECHNICAL SPECIFICATIONS Single phase 220-240 VAC, 30 A, 50/60 Hz (NEMA L14-30 plug included) Pneumatic backfill and door control: nitrogen/argon, 80 psi min; 1/4 in NPT anchor, 3/8 in OD polyflow tubing Input power Pneumatic requirements Ovens Wall: polished stainless steel only Heated shelf: hard anodized aluminum or polished stainless steel Material Inside dimensions (L x W x H) 18 in model: 18.5 in x 11.5 in x 10.5 in (469.9 mm x 292.1 mm x 266.7 mm) 27 in model: 27.8 in x 11.5 in x 10.5 in (706.1 mm x 292.1 mm x 266.7 mm) Stainless steel heated wall or heated shelf...

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