MX2000 is a modular glovebox system that can be configured to meet your specific process requirements and productivity goals with any combination of ovens and antechambers, gas analyzers, moisture monitors, and environmental chambers and controls. TYPICAL APPLICATIONS Semiconductor components • Wide choice of control capabilities ensures your process and budget needs are met • A range of vacuum pumps – dry, rotary vane, turbo- molecular – to meet your antechamber or oven requirements • Large window for excellent visibility and maintenance access • Optional PLC for glovebox components is quickly programmed with easy-to-use software • Sturdy, rugged construction for long equipment life and stable process platform • Optional single or dual-column gas purification units deliver ultra-low moisture and oxygen levels • Modular design enables economical glovebox customization for new systems, as well as easy upgrades as your process needs evolve Seam weld thin film Seam sealed package HERMETIC SEALING

HERMETIC SEALING GLOVEBOX SPECIFICATIONS & OPTIONS Features Antechambers and ovens Configuration options End, front, rear loading Heating Wall heating or heated shelves Temperature 125°C or 200°C, higher available Vacuum pumps Rotary vane, dry, or turbo pumps Analysis and monitoring capabilities Oxygen detection range 0-1000 PPM or % Moisture detection range 0-150 PPM or ° C dewpoint Helium monitoring % Argon Monitoring % Utilities Electrical 208-240 VAC, single-phase, 50/60 Hz, 30 amps (40 amps with two ovens) Specifications are subject to change without notice. Features Inputs Environmental...