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Special pumps for the semiconductor industry

Special pumps for the semiconductor industry

Product catalog summary
Pneumatic Diaphragm Pumps Overview

Specifications:
The document provides specifications for pneumatic diaphragm pumps of various sizes: 10, 20, 50, 100, and 200. Each pump size corresponds to a nominal port size ranging from 3/8" to 1 1/2" NPT. The air connection for most sizes is 1/4" NPT, except for the largest size, which is 3/8" NPT.

Air Classification:
According to ISO-DIS 8573-1, all pump sizes have a solid content classification of class 2, and both water and oil content classifications of class 3.

Suction Head:
The suction head varies depending on whether the pump is dry or wet. For dry conditions, it ranges from 1 to 4.5 meters water column (mWC), and for wet conditions, it is consistently 9 mWC for most sizes.

Driving Pressure:
The maximum driving pressure for all pump sizes is 6 bar.

Technical Data for FUTUR Models:
The document also includes technical data for different FUTUR pump models (H, T, E, S) at various pressures (2 to 6 bar). The performance varies, with the maximum capacity at 6 bar being 100 for models H and T, 70 for model E, and 130 for model S.

Operating Temperature:
The document mentions a section on the maximum permitted operating temperature, but the specific values are not provided.
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Catalog excerpts

Special pumps for the semiconductor industry -1

Technical data FUTUR (independentofthepump model) Pump size102050100200 Nominal port size (NPT)3/8"1/2"1"1 1/4"1 1/2" Air connection (NPT)1/4"1/4"1/4"1/4"3/8" Air classification acc. to ISO-DIS 8573-1: solid content, class22222 water content, class33333 oil content, class33333 Suction head, dry (mWC)12,53,544,5 Suction head, wet (mWC)89999 Max. driving pressure (bar)66666 >

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