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Allis Electric
Cryotec Marathon

Cryotec Marathon

Product catalog summary

Introduction
Allis Electric Co., Ltd, based in Hsinchu, specializes in the sales and customer service of cryogenic vacuum pumps for the semiconductor and high-tech electronics industries. The company aims to provide rapid and reliable service through a skilled technical team.

Business Operations
The company offers a range of products including the SHI cryo pumps suitable for sputtering, implantation, and vacuum coating machines. They also provide ultra-low temperature cryogenic systems for basic scientific research, RF generators, matching boxes, plasma ashers, and plasma cleaners.

Product Specifications
The document outlines various models of cryopumps and compressors, detailing their specifications such as flange types, pumping speeds, and maintenance intervals. The cryopumps are available in different models to meet diverse application needs, including standard, ultra-high vacuum, low profile, large-capacity, and water pump types.

Compressor Specifications
The compressors are designed for use with helium gas, featuring high efficiency and reliability. They incorporate a forced oil injection system for improved durability. Specifications include power supply, power consumption, starting current, and maintenance intervals.

Multiple Cryopump Operation System
The system allows for the simultaneous operation of two to six cryopumps with a single compressor, optimizing space and cost efficiency.

Optional Parts
The document mentions the availability of optional parts to enhance the functionality of the cryopumps and compressors.

Catalog excerpts

AEC1024_ P2_high revolution.pdf table.main {} tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:9.00pt "Times New Roman", serif; } .font1 { font:16.00pt "Times New Roman", serif; } ALLIS ELECTRIC CO., LTD 1

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AEC1024_ P2_high revolution.pdf table.main {} tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:10.00pt "Arial", sans-serif; } .font1 { font:18.00pt "Arial", sans-serif; } .font2 { font:19.00pt "Arial", sans-serif; } .font3 { font:20.00pt "Arial", sans-serif; } .font4 { font:40.00pt "Arial", sans-serif; } .font5 { font:20.00pt "Arial Black", sans-serif; } .font6 { font:9.00pt "Times New Roman", serif; } .font7 { font:12.00pt "Times New Roman", serif; } .font8 { font:13.00pt "Times New Roman", serif; } .font9 { font:18.00pt "Times New Roman", serif; } .font10 { font:20.00pt "Times...

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AEC1024_ P2_high revolution.pdf table.main {} tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:40.00pt "Arial", sans-serif; } .font1 { font:9.00pt "Times New Roman", serif; } .font2 { font:10.00pt "Times New Roman", serif; } .font3 { font:13.00pt "Times New Roman", serif; } .font4 { font:14.00pt "Times New Roman", serif; } Vacuum Equipment We are engaged in sales and customer support of the hi-technical, and hi-reliable vacuum manufacturing equipment. We have the best service team and fully technical support to satisfy our customers. Our handling products are: Cryo Pump CRYOTEC,...

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AEC1024_ P2_high revolution.pdf table.main {} tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:10.00pt "Arial", sans-serif; } .font1 { font:13.00pt "Arial", sans-serif; } .font2 { font:15.00pt "Arial", sans-serif; } .font3 { font:9.00pt "Times New Roman", serif; } .font4 { font:11.00pt "Times New Roman", serif; } .font5 { font:13.00pt "Times New Roman", serif; } A variety of model types are able to meet the need for diverse applications flexibly ■ W$ʗ1MM List of models Cryopump unit Compressor unit STANDARD TYPE CRYOTEC-6 U102EWA CRYOTEC-8 CRYOTEC-10 U104EWA CRYOTEC-12 CRYOTEC-14...

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AEC1024_ P2_high revolution.pdf table.main {} tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:13.00pt "Arial", sans-serif; } .font1 { font:9.00pt "Times New Roman", serif; } .font2 { font:10.00pt "Times New Roman", serif; } .font3 { font:11.00pt "Times New Roman", serif; } .font4 { font:12.00pt "Times New Roman", serif; } .font5 { font:13.00pt "Times New Roman", serif; } .font6 { font:14.00pt "Times New Roman", serif; } ■ lil@ffifAiȉAnatomy of model number dsignations ■ Cryopump unit # Compressor unit CRYOTEC 6 I L ! U 104 E W A 6 1 Enclosure shell diameter Compressor unit Capacity...

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AEC1024_ P2_high revolution.pdf table.main {} tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:9.00pt "Arial", sans-serif; } .font1 { font:13.00pt "Arial", sans-serif; } .font2 { font:9.00pt "Times New Roman", serif; } .font3 { font:10.00pt "Times New Roman", serif; } .font4 { font:11.00pt "Times New Roman", serif; } ■ Standard type cryopumps 13 diffrent models are available'in diameters from 6 to 22 inches'with 2 types of flange. These models have a wide range of applications'including in semi-conductor manufacturing equipment' and they can meet your needs for a speedily pumped...

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AEC1024_ P2_high revolution.pdf table.main {} tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:9.00pt "Arial", sans-serif; } .font1 { font:13.00pt "Arial", sans-serif; } .font2 { font:9.00pt "Times New Roman", serif; } .font3 { font:10.00pt "Times New Roman", serif; } .font4 { font:11.00pt "Times New Roman", serif; } ■ Standard specfcatons(Standard type) CRYOTEC-12 CRYOTEC-16 CRYOTEC-22 Flange type and size ANSI 10-inch(JIS 12-inch[VG300]) ANSI 14-inchQlS 16-inch) JIS 22-inch[VG550](ANSI 20 inch) Nitrogen(air) 4000 l/s 5300 l / s 10000 l/s Pumping speed(20°C) Water 9300 l/s 16000...

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AEC1024_ P2_high revolution.pdf table.main {} tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:13.00pt "Arial", sans-serif; } .font1 { font:40.00pt "Arial", sans-serif; } .font2 { font:9.00pt "Times New Roman", serif; } .font3 { font:14.00pt "Times New Roman", serif; } ■ Outline drawing(Standard type) CRYOTEC-8 CRYOTEC-8 8

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AEC1024_ P2_high revolution.pdf table.main {} tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:9.00pt "Times New Roman", serif; } .font1 { font:14.00pt "Times New Roman", serif; } CRYOTEC-12 10

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AEC1024_ P2_high revolution.pdf table.main {} tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:40.00pt "Arial", sans-serif; } .font1 { font:14.00pt "Times New Roman", serif; } CRYOTEC-22 CRYOTEC-22

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AEC1024_ P2_high revolution.pdf table.main {} tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:13.00pt "Arial", sans-serif; } .font1 { font:9.00pt "Times New Roman", serif; } .font2 { font:10.00pt "Times New Roman", serif; } .font3 { font:11.00pt "Times New Roman", serif; } .font4 { font:12.00pt "Times New Roman", serif; } .font5 { font:14.00pt "Times New Roman", serif; } ■ Compressons We have developed a sries of compressor exclusively for use with helium gas , by making the fullest use of the extensive technology we have developed in the field of air-conditioners and freezers...

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Cryotec Marathon

Cryotec Marathon

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