MS/MCS Series Mass Flow Measurement and Control for Corrosive Gases alicat.com/msmcs Series Overview Alicat Scientific MS-Series digital mass flow meters accurately and rapidly measure the mass flow rate, volumetric flow rate, pressure and temperature of corrosive process gases such as NH3, H2S and SiH4. MCS-Series mass flow controllers further provide precise control of mass flow, volumetric flow and pressure via customized high-speed proportional control valves. At the heart of Alicat’s MS/MCS-Series mass flow meters and controllers is a patented, internally compensated, laminar differential pressure measurement technology that yields linear results over a very wide flow range. This produces volumetric and mass flow data that is fully compensated for changes in pressure and temperature and corrected for the user’s STP. Alicat backs MS/MCS-Series mass flow meters and controllers with NIST-traceable calibration, free technical phone support and a lifetime warranty. Alicat MS/MCS-Series mass flow meters and controllers feature stainless steel flow bodies, corrosionresistant elastomers and 34 to 36 user-selectable gas calibrations. Large integrated displays with touchpads provide a user interface for gas selection, setpoint control and PID valve tuning. The MS/ MCS Series comes standard with both analog and RS-232 digital communications. Extensive product customizations are available, including Class 1, Div 2 ATEX/CSA ratings for use in hazardous environments and battery operation for meters (MBS Series). Applications Alicat Scientific MS/MCS-Series digital mass flow meters and controllers are best suited to processes that require the use of corrosive gases, such as semiconductor and solar PV manufacturing. Multi-variable measurement and control functionality, multiple gas calibrations and a low 100:1 turndown ratio allow a single MS/MCS-Series meter or controller to replace several application-specific devices. Available 0.4% accuracy, 0.2% full-scale repeatability and <100 ms control response times optimize gas control processes. The MS/MCS Series is available in full-scale mass flow rates from 0-0.5 sccm to 0-3000 slpm.

Technical Data for Alicat MS Mass Flow Meters 0 – 0.5 sccm Full Scale through 0 – 3000 slpm Full Scale Alicat MS instruments are built for use with certain aggressive gases. Standard Specifications (Contact Alicat for available options.) Performance MS Mass Flow Meter Accuracy at calibration conditions after tare ± (0.8% of Reading + 0.2% of Full Scale) ± (0.4% of Reading + 0.2% of Full Scale) High Accuracy option not available for units ranged under 5 sccm or over 500 slpm. High Accuracy at calibration conditions after tare Accuracy for Bidirectional Meters at calibration conditions after tare...