Digital Mass Flow Control for Vacuum Conditions alicat.com/mce alicat.com/mcv Series Overview Alicat Scientific MCE-Series digital mass flow controllers precisely control the mass flow rate, volumetric flow rate and pressure of process gases with the same form, fit and function as other branded flow controllers. Downstream, high-speed proportional control valves are enclosed within the flow bodies to conform to the SEMI international standard footprint. Alicat’s MCV-Series digital mass flow controller for hard vacuum applications adds an integrated positive shut-off valve to the MCE body. This provides a leak-tight shutoff of 1x10-9 atm-scc/s (He) to prevent contamination. The MCE and MCV series of mass flow controllers run on a patented, internally compensated, laminar differential pressure measurement technology that yields linear results over a very wide flow range. This produces volumetric and mass flow data that is fully compensated for changes in pressure and temperature and corrected for the user’s STP. Alicat backs every mass flow instrument with generous customer support, including free technical phone support, prompt recalibration service and a lifetime warranty. Alicat MCE-Series and MCV-Series mass flow controllers feature large integrated displays with touchpadaccessible gas selection, setpoint control and PID valve tuning. Available 0.4% accuracy, 0.2% full-scale repeatability and <100 ms control response times optimize gas control processes via both analog and RS232 digital communications. Extensive product customizations are available, including Class 1, Div 2 ATEX/ CSA ratings for use in hazardous environments. Applications Alicat Scientific MCE-Series and MCV-Series mass flow controllers are suitable for applications that require adherence to the SEMI standards, as is the case in the semiconductor and vacuum deposition industries. MCE-Series controllers are best suited for soft vacuum applications, and the MCV Series for hard vacuum. Multi-variable measurement and control functionality, multiple gas calibrations and a low 200:1 turndown ratio allow a single MC-Series controller to replace several application-specific devices. The MCE and MCV series are available in full-scale mass flow rates from 0-0.5 sccm to 0-20 slpm.

Technical Data for Alicat MCV and MCVS Mass Flow Controllers 0 – 0.5 sccm Full Scale through 0 – 20 slpm Full Scale www.alicat.com/mc Alicat’s MCV mass flow controllers are designed for applications that require tight shut-off such as vacuum coating and sputtering processes. An integrated pneumatic shut-off valve is normally closed and provides positive shut-off of 1 x 10-9 atm scc/sec Helium max. MCVS controllers are for use with aggressive gases. Standard Specifications (Contact Alicat for available options.) Performance MCV Mass Flow Controller Accuracy at calibration conditions after tare...