MS/MCS Series Mass Flow Measurement and Control for Corrosive Gases alicat.com/msmcs Series Overview Alicat Scientific MS-Series digital mass flow meters accurately and rapidly measure the mass flow rate, volumetric flow rate, pressure and temperature of corrosive process gases such as NH3, H2S and SiH4. MCS-Series mass flow controllers further provide precise control of mass flow, volumetric flow and pressure via customized high-speed proportional control valves. At the heart of Alicat’s MS/MCS-Series mass flow meters and controllers is a patented, internally compensated, laminar differential pressure measurement technology that yields linear results over a very wide flow range. This produces volumetric and mass flow data that is fully compensated for changes in pressure and temperature and corrected for the user’s STP. Alicat backs MS/MCS-Series mass flow meters and controllers with NIST-traceable calibration, free technical phone support and a lifetime warranty. Alicat MS/MCS-Series mass flow meters and controllers feature stainless steel flow bodies, corrosionresistant elastomers and 34 to 36 user-selectable gas calibrations. Large integrated displays with touchpads provide a user interface for gas selection, setpoint control and PID valve tuning. The MS/ MCS Series comes standard with both analog and RS-232 digital communications. Extensive product customizations are available, including Class 1, Div 2 ATEX/CSA ratings for use in hazardous environments and battery operation for meters (MBS Series). Applications Alicat Scientific MS/MCS-Series digital mass flow meters and controllers are best suited to processes that require the use of corrosive gases, such as semiconductor and solar PV manufacturing. Multi-variable measurement and control functionality, multiple gas calibrations and a low 100:1 turndown ratio allow a single MS/MCS-Series meter or controller to replace several application-specific devices. Available 0.4% accuracy, 0.2% full-scale repeatability and <100 ms control response times optimize gas control processes. The MS/MCS Series is available in full-scale mass flow rates from 0-0.5 sccm to 0-3000 slpm.

Technical Data for Alicat MCS and MCRS Mass Flow Controllers 0 – 0.5 sccm Full Scale through 0 – 3000 slpm Full Scale Alicat MCS and MCRS instruments are built for use with certain aggressive gases. Standard Specifications (Contact Alicat for available options.) Performance MCS & MCRS Mass Flow Controller Accuracy at calibration conditions after tare High Accuracy at calibration conditions after tare Repeatability ± (0.8% of Reading + 0.2% of Full Scale) ± (0.4% of Reading + 0.2% of Full Scale) High Accuracy option not available for units ranged under 5 sccm or over 500 slpm. ± 0.2% Full Scale...