Mass Flow Controller for SEMI or Vacuum Easy upgrade for more stable control response, adjustable to under 50 ms Fast • Repeatable • Stable Industry-leading control response The Fastest Flow Controller Company in the World!

Mass Flow Controllers (SEMI / Vacuum) Quick Specs • Accuracy: 0.8% of the reading (0.4% optional) + 0.2% full-scale repeatability (NIST-traceable). • Linear range: 0.5-100% of full scale (200:1). • Multi-gas calibration: 98-130 gases preloaded, plus COMPOSER™1 gas composition firmware. • All flow data visible on one screen (setpoint, mass flow, vol. flow, pressure, temperature). • Lifetime warranty gives you peace of mind. • Precision Dispensing Package relies on our fast valves to dispense metered amounts of gas. • Industrial communications: EtherNet/ IP, DeviceNet, PROFIBUS, or Modbus •Anti-Corrosive...