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Alicat Scientific
Mass Flow Controller for SEMI or Vacuum

Mass Flow Controller for SEMI or Vacuum

Product catalog summary

Overview: The document is a brochure for Alicat Scientific's Mass Flow Controllers (MFCs) designed for SEMI or vacuum applications. It highlights the controllers' fast, repeatable, and stable performance, making them suitable for precise gas flow control in industrial settings.

Specifications:

Accuracy: 0.8% of reading (0.4% optional) + 0.2% full-scale repeatability, NIST-traceable.
Linear range: 0.5-100% of full scale (200:1).
Multi-gas calibration: 98-130 gases preloaded, with COMPOSERTM gas composition firmware.
Control response time: 50-100 ms or lower.
Lifetime warranty.

Features:

All flow data visible on one screen, including setpoint, mass flow, volume flow, pressure, and temperature.
Accessible PID valve tuning for optimal speed and stability.
No warm-up time; ready to control process flows in one second.
Anti-corrosive configuration with 316L stainless steel flow path and sensor.

Options:

Matching pinouts for 9-pin and 15-pin D-Sub connectors.
Digital communications via RS-232 or RS-485.
Analog signals: 0-10v, 0-5v, 1-5v, or 4-20 mA.
Welded fittings in VCR or compression formats.
Industrial communications: EtherNet/IP, DeviceNet, PROFIBUS, or Modbus.

Applications: The MFCs are tailored for controlling the partial pressures of reactive gases in vacuum chambers, with sub-50 ms control response to prevent target poisoning and ensure proper atom release.

Product Variants:

MCV Series: Designed for vacuum applications, available with welded 1/4” male VCR fittings and analog 0-5v and digital RS-485 communications.
MCE Series: Replacement for MKS 1179A, GE50A, and similar controllers, also available with welded 1/4” male compression fittings and integrated pneumatic shut-off valve.

Catalog excerpts

Mass Flow Controller for SEMI or Vacuum-1

Mass Flow Controller for SEMI or Vacuum Easy upgrade for more stable control response, adjustable to under 50 ms Fast • Repeatable • Stable Industry-leading control response The Fastest Flow Controller Company in the World!

Open the catalog to page 1

Mass Flow Controller for SEMI or Vacuum-2

Mass Flow Controllers (SEMI / Vacuum) Quick Specs • Accuracy: 0.8% of the reading (0.4% optional) + 0.2% full-scale repeatability (NIST-traceable). • Linear range: 0.5-100% of full scale (200:1). • Multi-gas calibration: 98-130 gases preloaded, plus COMPOSER™1 gas composition firmware. • All flow data visible on one screen (setpoint, mass flow, vol. flow, pressure, temperature). • Lifetime warranty gives you peace of mind. • Precision Dispensing Package relies on our fast valves to dispense metered amounts of gas. • Industrial communications: EtherNet/ IP, DeviceNet, PROFIBUS, or Modbus •Anti-Corrosive...

Open the catalog to page 2

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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