Vacuum Measurement Catalog

Vacuum Measurement Catalog
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Vacuum Measurement Catalog

Product catalog summary
Features and Benefits
Agilent vacuum gauges and controllers are designed for reliability, accuracy, and cost-effectiveness in measuring and controlling vacuum pressure across various applications. They are robust and suitable for industrial environments, ensuring maximum productivity and uptime. With over 50 years of experience, Agilent provides superior accuracy and stability for scientific requirements.
Gauge Selection
Agilent offers a range of gauge controllers for different vacuum levels, from rough to ultra-high vacuum. The controllers are pre-calibrated, easy to install, and feature large LED displays for readability.
Applications
Agilent vacuum gauges are used in high-energy physics, industrial processes, nanotechnologies, semiconductor manufacturing, and analytical instrumentation. They are essential for processes like thin film deposition, device processing, and mass spectrometry.
Gauge Controller
The XGS-600 Gauge Controller is versatile, capable of operating multiple gauges simultaneously. It features a user-friendly interface with customizable gauge labels and supports various communication protocols.
Transducers and Active Gauges
Agilent provides a variety of transducers and active gauges that do not require a separate controller. These devices are robust and reliable, suitable for general rough vacuum use and specific applications requiring high accuracy.
Cables and Technical Notes
Agilent offers a range of cables compatible with their gauges and controllers, ensuring seamless integration and operation. Technical notes provide insights into the optimal use and maintenance of vacuum measurement systems.
Specifications
  • Display and Update: The controller can display up to two channels in a large font, readable from 15 feet, with updates every 200 milliseconds.
  • Gauge Capability: Supports up to 4 Hot Filament BA gauges, 5 Inverted Magnetron Gauges (IMG), 12 rough gauges, and 12 Active Gauges using various cards.
  • Measurement Range: From 1 x 10-11 Torr to atmospheric pressure, depending on the card and gauge type.
  • Set Points and Relays: Eight programmable setpoints with fast response and eight mechanical relays with specific ratings.
  • Communications and Outputs: Includes RS232 and RS485 serial communications, and analog outputs with a 200 msec update rate.
  • Power and Temperature: Universal power input (100-240 VAC) and operational temperature range of 5-40 °C.
  • Regulatory Approvals: CE certified, RoHS compliant, and BV certified for USA and Canada.
Ordering Information
  • XGS-600 Controller: Configurable with various cards for different gauge types, with specific part numbers for each configuration.
  • Cables and Accessories: Various lengths and types of cables are available, along with field-installable cards and mounting kits.
  • Power Cords: Different power cords are available for various regions, each with specific part numbers.
Gauge Details
  • ConvecTorr Gauge: A convection-enhanced thermal gauge with a fast response time and high accuracy, suitable for rough vacuum applications.
  • Thermocouple Gauges (531 and 536): Provide continuous and accurate rough vacuum pressure indication, with the 536 offering extended sensor life.
  • Ionization Gauges (572, 571, 563): High-performance gauges with wide linear response ranges, designed for high vacuum applications.
  • MBA2-200 Gauge: A compact, rugged gauge with dual ion collectors, providing reliable measurements and burnout resistance.
Technical Specifications
The document provides detailed specifications for various Agilent vacuum gauges, including the MBA2-200, IMG-100, IMG-300, UHV-24, PVG-500, CDG-500, and PCG-750 series. Key specifications include materials, operating temperatures, measurement ranges, and sensitivity levels.
Applications and Features
The gauges are designed for a range of industrial applications, including metal deposition, vacuum furnaces, and semiconductor production. Features highlighted include compact design, ease of integration, and high accuracy.
Performance and Benefits
Each gauge series is designed to offer specific benefits such as fast recovery from atmospheric pressures, minimal outgassing, and high sensitivity.
Agilent Ionization Gauge Controls
The Agilent ionization gauge controls integrate the electrometer and meter, ensuring that errors are minimized during calibration. This integration enhances the accuracy and repeatability of measurements.
Cold Cathode Gauges
Cold cathode gauges are cost-effective and durable options for high-vacuum applications. They offer stable operation over a wide pressure range with repeatability better than 98%.
See more

Catalog excerpts

Vacuum Measurement Catalog-1

AGILENT Vacuum Measurement Gauge Selection Card 8-11 Gauge Controller 13-21 Transducers 22-37 Active Gauges 38-39 Cables 40-43 Technical Notes

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Vacuum Measurement Catalog-2

Vacuum Measurement for Science and Industry Agilent vacuum gauges and controllers are reliable, accurate, and cost- effective tools for measuring and controlling vacuum pressure in a wide • Agilent features pressure measurement technology designed for challenging industrial environments: simplicity, rugged design, plus ease of service to insure maximum productivity and uptime in your vacuum system or vacuum process. • With over 50 years experience in science research, our superior accuracy and stability meets the most demanding scientific requirements. Rough Gauge Controllers Reliable, cost-effective...

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Vacuum Measurement Catalog-3

Vacuum Measurement Intelligent Design & Functionality • Simultaneous operation of all gauges – up to 12 • < 20 millisecond signal-to-set- point response time • Standard features include: – fully programmable RS-232/485 serial communications • Displays up to 8 gauges at one time – E-beam degas for hot filament gauges – pressure unit selection: Torr, mbar, Pascal – universal voltage compatability – analog output Main Screen Vacuum Measurement Intuitive screen functions • Displays up to 8 gauges on one screen • Customizable gauge labels Capacity, Flexibility & Expandability Only 3 gauge cards operate...

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Vacuum Measurement Catalog-4

Agilent Gauge Selection Chart Transducers Controller Required ConvecTorr 536 ConvecTorr quality a ccuracy and repeatability Best overall accuracy and repeatability. Secure bayonet connector. pag. 12 531 Most economical r ough gauge 572 Glass; most popular general purpose HV gauge ( hot filament). Dual filament. pag. 15 571 Glass; same as 563 without platinum coating pag. 16 cold cathode board 563 Best general purpose HV gauge (hot filament) for overall performance and reliability. pag. 17 MBA2-200 Small, rugged, wide range HV gauge (cold cathode); f astest response pag. 19 ULTRA HIGH VACUUM 10-9...

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Vacuum Measurement Catalog-5

Vacuum Measurement Rough Gauge Packages Active Gauges RGC-100/RGC-150: Pre-calibrated rough gauges and controller packages PVG-500 Robust, reliable; general rough vacuum use CDG-500 Full scale range options; push-button zeroing and setpoints pag. 24 Multi-gauge Controller PCG-750 Combo Pirani a nd CDG for accuracy and gas-type independence pag. 26 P irani and B/A - widest v acuum measurement range pag. 28 Active Gauge Controller/Display AGC-100/AGD-100: Low cost active gauge controllers automatically identify the connected gauge Vacuum Measurement FRG-700 Combo Pirani a nd IMG – accuracy from...

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Vacuum Measurement Catalog-6

Physics R&D, Accelerators •  Synchrotron Light Sources and Beam Lines •  Particle Accelerator Rings Vacuum gauges are widely used in High Energy Physics, Fusion Technology and general UHV research. Synchrotron Light Sources, Particle Accelerator Rings, UHV Laboratory research, and Fusion reactors need extremely accurate, reliable and cost effective HV and UHV gauges. Agilent offers a full range of vacuum transducers that can be equipped with high function controllers to monitor and control HV and UVH environments. If desired, Agilent also offers “Active Gauges” equipped with on-board controllers...

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Vacuum Measurement Catalog-7

Vacuum Measurement Scanning electron microscopes, like the one shown here, can “see” details as small as one nanometre – one millionth of a metre! An NRC researcher uses a liquid chromatography-mass spectrometry system to quantify toxins in shellfish samples. Nanotechnologies & Semiconductor Manufacturing Analytical Instrumentation • Mass Spectrometry Mass Spectrometry has become an important analytical tool in many industries including pharmaceuticals and life sciences. Thanks to advances in electronics, instrument designers can implement cost-effective, high-performance analytical power in...

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Vacuum Measurement Catalog-8

AGILENT GAUGE CONTROLLER _^^^^H I. I TOKH COHTEOlSfl^n^l" The XGS-600 Vacuum Gauge Controller provides unprecedented capacity, performance and flexibility in a cost effective, standard half-rack package. A single controller can simultaneously operate up to four hot filament (or four cold cathode) gauges and four convection gauges, up to five cold cathode gauges, or up to twelve convection gauges. Expansion or re-configuration in the field is easy to do. Serial communications (RS-232 or RS-485), sixteen set points, and universal voltage compatibility are standard in all units. A programmable dot...

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Vacuum Measurement Catalog-9

Vacuum Measurement XGS-600 Controller operates all Agilent gauges with only 3 gauge cards… convection, hot filament and cold cathode (inverted magnetron) Accelerators, Synchrotrons and Other Large Facilities • ignal response – <20 milliseconds from signal S to set point response – ideal for fast acting valves • apacity – operates up to 5 IMG gauges in one controller C • ompact – half-rack size saves up to 50-75% C of rack space from other controller options • perability – fully programmable serial communications O with individual gauge labeling; choice of RS-232/485 • lexibility – combine UHV/HV...

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Vacuum Measurement Catalog-10

Agilent Gauge Controller Dimensions: millimeters (inches) Technical Specifications User interface LCD monochrome dot matrix, 240 x 128, white LED backlight; 5 button keypad Display capability to eight simultaneous channels of pressure measurement, up to a 5 character user label for each; up to Up two channels in a large font; readable from 15 feet; display updates every 200 msec Gauge capability to 4 Hot Filament BA gauges including metal, glass, and nude UHV types using the HFIG** cards; up to Up 5 IMGs* using the IMG* cards; up to 12 rough gauges using the Dual Convection Gauge Cards; up to...

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Vacuum Measurement Catalog-11

Vacuum Measurement Ordering Information Description XGS-600 Vacuum Controller, without cards Configure your XGS-600 Controller with cards – constructing your part number:   1 Refer to the Gauge Selection Chart to help determine the gauge you need   2 Choose the number of HFIG** cards you want; place after the ”H”; will be 0 to 4   3 Choose the number of IMG* (cold cathode) cards you want; place after the “M”; will be 0 to 5   4 hoose the number of Dual Convection Gauge Cards; place after the “C”; each card C runs two convection type gauges, will be 0 to 6   5. f ordering Active Gauge (Analog...

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.