Agilent Diffusion Pumps 2-3 Typical Applications Pump Models Technical Notes

Diffusion Pumps Features and Benefits Agilent has earned its position as the leading diffusion pump manufacturer in the world by listening to customer needs and by continuously improving the performance and reliability of our benchmark designs. Throughout our more than forty years of leadership in the industry, we have consistently produced pumps that provide the most efficient means of converting heat into pumping throughput. Our experience has allowed us to optimize the design of every element of the pump. As a result, Agilent diffusion pumps offer you the lowest cost of ownership available...

Diffusion Pumps World-class Service, Training and Support Agilent’s application consulting capability makes use of our unparalleled experience to identify the optimal solution for you. And we invite you to take advantage of our industry leading worldwide service and support programs and award winning vacuum training classes to maximize system uptime and productivity. Diffusion Pumps Low Cost of Ownership By providing the highest throughput available per unit of power, reduced cooling water requirements, and rugged, durable stainless steel construction, Agilent delivers large volume pumping at...

Typical Applications Courtesy of Mill Lane Engineering Courtesy of Materials Research Furnaces, Inc. As the worldwide diffusion pump market leader, Agilent produces the most comprehensive family of pumps, ranging from 2 in. to 35 in. in diameter, and is the only broad-line, U.S.-based manufacturer. Diffusion pumps are in wide use because they have several advantages: They are reliable, simple in design, operate without noise or vibration, and are relatively inexpensive to operate and maintain. In fact, diffusion pumping is still the most economical means of creating high-vacuum environments....

Diffusion Pumps Diffusion Pumps for large area coating systems. The large pumps used in this application come equipped with sight glass and drain assemblies and are also available with ASA or ISO flanges. Vacuum Furnaces Vacuum furnace applications require pumps that are capable of achieving stable pressures in high gas flow environments. Additionally, furnace operators need shorter cycle times to accomplish efficient processing of heat-treated material batches. Coatings (Optical, Electronics, Protective) With low ultimate pressure, high speed, high throughput and high tolerable forepressure,...

Previous model number Pumping speed*, l/s (operating range) Air Helium & hydrogen Pumping speed AVS 4.1 (1963)* Maximum forepressure, Torr (mbar) No load Full load Maximum throughput, T-l/s (mbar-l/s) In operating range @1 x 10-2 Torr (1.3 x 10-2 mbar) Minimum recommended backing pump for maximum throughput, cfm (m3/hr) Warmup time, minutes Cooldown time, minutes with quick cool coil, where applicable Backstreaming rate at inlet flange mg/cm2/min (standard cold cap)* Fluid charge Electrical requirements Power, watts Cooling water, U.S. gpm (l/hr) at 60-80 °F (15-26 °C) ** For descriptions of...

Diffusion Pumps

Pump Models Agilent AX-65 Dimensions: inches (millimeters) Technical Specifications Pumping speed*, operating range Maximum throughput Compression ratio Operating range Maximum forepressure Backstreaming rate** Recommended backing pump Warmup time Cooldown time Fluid charge Electrical requirements Pump power Air cooling 65 l/sec air, 90 l/s He and H2 0.19T-l/s (0.25 mbar-l/s) in operating range, 0.30T-l/s (0.40 mbar-l/s) @ 0.01 Torr 4 x 107 (air), 2 x 106 (helium) 3 x 10-3 to <5 x 10-8 Torr (3.9 x 10-3 to 6.5 x 10-8 mbar) No load: 0.75 Torr (1.00 mbar) Full load: 0.60 Torr (0.78 mbar) With cold...

Diffusion Pumps AX-65 - Pumping Speed - Air/N2 Throughput (Torr-l/sec) Inlet pressure (Torr) Pumping speed/Cold cap Pumping speed/Halo baffle Throughput Ordering Information Description AX-65 with standard cold cap, 115 V, 250 W AX-65 with internal baffle, 115 V, 250 W AX-65 with standard cold cap, 220 V, 250 W AX-65 with internal baffle, 220 V, 250 W AX-65 with standard cold cap, 115 V, 200 W AX-65 with internal baffle, 115 V, 200 W AX-65 with standard cold cap, 220 V, 200 W AX-65 with internal baffle, 220 V, 200 W AX-65 with standard cold cap, 90 V, 250 W AX-65 with internal baffle, 90 V, 250...

Pump Models Agilent HS-2 .84 DIA O.D. (21.3) Dimensions: inches (millimeters) Technical Specifications Pumping speed, operating range Pumping speed*, AVS 4.1 (1963) Maximum throughput Operating range Maximum forepressure Recommended backing pump Backstreaming rate**, standard cold cap Warmup time Cooldown time Fluid charge Electrical requirements Pump power Cooling water requirements Water connections 160 l/s air, 200 l/s He and H2 285 l/s air 0.60 T-l/s (0.80 mbar-l/s) in operating range, 0.70 T-l/s (0.93 mbar-l/s) @ 0.01 Torr 3.7 x 10-3 to < 5 x 10-8 Torr, (4.9 x 10-3 to < 6.5 10-8 mbar) No...

Diffusion Pumps HS-2 Pumping Speed - Air/N2 Inlet pressure (Torr) Pumping speed Throughput Ordering Information Description With standard cold cap, 120 V With standard cold cap, 240 V Description Water-cooled baffle with ASA flanges Santovac 5 diffusion pump fluid, 500 cc pump fluid, 500 cc DC-702 diffusion pump fluid, 500 cc DC-704 diffusion pump fluid, 500 cc DC-705 diffusion pump fluid, 500 cc Instruction manual Replacement Parts (one heater required per pump) 350 W, 120 V heater (HS2A) 1.0 (0.5) 350 W, 240 V heater (HS2A) 1.0 (0.5) 450 W, 120 V heater 1.0 (0.5) 450 W, 240 V heater 1.0 (0.5)...

Pump Models Agilent VHS-4 Dimensions: inches (millimeters) Technical Specifications Pumping speed*, operating range Pumping speed*, AVS 4.1 (1963) Maximum throughput Operating range Maximum forepressure Recommended backing pump Backstreaming rate**, standard cold cap Warmup time Cooldown time Fluid charge Electrical requirements Pump power Cooling water requirements Water connections 750 l/s air, 940 l/s He/H2 1,200 l/s air 1.5 T-l/s (2.0 mbar-l/s) in operating range, 2.5 T-l/s (3.2 mbar-l/s) @ 0.01 Torr 2 x 10-3 to <5 x 10-9 Torr (2.7 x 10-3 to <6.5 x 10-9 mbar) No load: 0.65 Torr (0.86 mbar)...