Ion Pumps Features and Benefits Controllers Features and Benefits 6,7 SEM Pump Controller Features and Benefits 8-11 Typical Applications 12-40 Pump Models and Controllers 41-51 Technical Notes 52-53 Service and Support Plan

Agilent Ion Pumps Features and Benefits Ion Pump Evolution ● Since the late 1950’s, when the ion pump was invented at Varian, now Agilent Technologies, many changes and technical improvements have taken place. Virtually all of the major innovations have come from us, from the first Diode VacIon pump to the Triode, then to the StarCell series pumps, and the VacIon Plus. Wide Pumping Speed Range • Miniature/Appendage pumps from 0.2 to 10 l/s • Small/Medium pumps from 20 to 75 l/s • Large size pumps from 150 to 2500 l/s • TSP/Combi pumps VacIon Plus ● VacIon Plus is a complete family of ion pumps,...

Custom Design The pump body can be configured to meet optional requirements including: • Cryopanel and TSP side or bottom mounted • Integral heaters Feedthroughs • Eliminate corrosion • Implement the “High Voltage Cable Interlock” • Provide an easy connection • Prevent unintentional extraction • Minimize overall dimensions Pumping Elements Three different types of pumping elements are available to cover all possible gas mixtures and optimize the application specific performances: • Diode • Noble Diode • Our unique StarCell • Agilent cables have an “HV Safety Interlock” that prevents any chance...

The New Agilent 4UHV Ion Pump Controller Features and Benefits More Choice and Flexibility ● The VacIon Plus pump family is complemented by the new 4UHV Ion Pump controller, that provides different power levels and interface capabilities. ● The compact MiniVac controller and a dedicated TSP controller are also available. ● The new series of IPCU controller units completes Agilent’s offer (see next pages). ● The existing range of ion pump controllers offers more choice and flexibility than ever before. With the latest in design features, they are simple and easy to operate; just select the right...

Low Noise For SEM applications especially, the remaining AC component of the HV output was reduced to a minimum. It is much lower than in any other existing unit, eliminating the need for additional filters completely in many cases. Typical Current vs Pressure Curve Safety To protect you against high voltage the cable is equipped with an interlock system which immediately shuts down the high voltage when the plug is removed from the pump. The protect mode limits the current to protect the pump and the controller. Pressure Reading The 4UHV is preprogrammed to automatically convert current reading...

Agilent SEM Ion Pumps Features and Benefits The Agilent Advantage: Dedicated Solutions for SEM Applications ● Agilent is the only manufacturer to offer specially designed SEM ion pumps. These pumps are ideal for the high vacuum guns where stable vacuum and low leakage current is required to control and preserve the charged particle filament. ● The key to this superior performance is Agilent’s patented anode design which uses contoured cells and simplified electrical elements. This insures stable current readings and lower particle generation. ● When combining the SEM ion pump on the gun with...

Dedicated Magnetic Stray Shields Agilent Feedthrough and Cables Higher Pumping Speed • External magnetic shields for stray magnetic field reduction available individually on request • The HV Safety Interlock prevents any chance of electrical shock • Optimized magnetic circuit for max. performance in a very compact package • The voltage is automatically cut off as soon as the cable is disconnected from the pump • Faster pump down Available in Round Shape Integrated ion pump/column allows: • Optimum mass balancing • Improved pumping conductance • Compact and modular design • Simmetric weight distribution...

Typical Applications for Agilent VacIon Plus Pumps Research and Development Particle Accelerators & Synchrotron Light Sources In these machines, electrically charged particles (electrons for the production of synchrotron light or ions for particle accelerators) are forced to follow a curved trajectory in a ring called a storage ring. Charged particles circulate for hours in the storage ring, at constant energy, in an ultra-high vacuum environment. Before their injection into the storage ring, the particles first have to be accelerated inside an injection system composed of one or two accelerators...

Courtesy Pacific Northwest National Laboratory. Ion Pumps • Beam Lines The experimental hall, around the storage ring, houses the beamlines built tangentially to the ring. The beamlines are usually specialized in a field of research (such as biology, polymers, and magnetism) or an experimental method (such as diffraction, EXAFS, and imaging). Some of the longest beamlines are built outside the experimental hall. Generally, large pumps are used in this part, from 300 l/s to 500 l/s. They can be combined with TSP and cryopanel in order to pump even the lightest molecules. • Miscellaneous Projects...

Agilent Ion Pumps Typical Applications Mass Spectrometry • Analytical systems that use focused charged particle beams (CPB) and certain types of mass spectrometers such as magnetic sector or Fournier Transfer often require ultra-high vacuum. • These applications have very stringent performance requirements for sensitivity, resolution, sample throughput and measurement repeatability. These requirements are driven by the need to analyze ever-smaller samples, especially in semiconductor, manufacturing, and other high-tech applications. • In general these applications require very clean vacuum pumping,...

• Medical Radiological equipment manufacturers use electron devices for critical components in the radiological chain, such as X-ray image intensifiers and radiological imaging units for diagnostics, as well as medical linear accelerators for radiation therapy. Typical fields of application include: - Medical Imaging (X-ray image tubes and devices) - Radiation Therapy (high power Klystrons, LINAC) - Magnetic Resonance Imaging. Courtesy University of Modena. the industrial field for a wide range of applications using vacuum processed electron devices used worldwide in: • Space Electron devices...