AGILENT DIFFUSION PUMPS Typical Applications Pump Models

Diffusion Pumps Features and Benefits Agilent has earned its position as the leading diffusion pump manufacturer in the world by listening to customer needs and by continuously improving the performance and reliability of our benchmark designs. Throughout our more than forty years of leadership in the industry, we have consistently produced pumps that provide the most efficient means of converting heat into pumping throughput. Our experience has allowed us to optimize the design of every element of the pump. As a result, Agilent diffusion pumps offer you the lowest cost of ownership available...

Diffusion Pumps DIFFUSION Pumps Built for Production Volumes Our success is in helping you meet the exacting requirements of your production process. Our pumps deliver superior pumping at high pressure and high gas flow conditions, and handle gas load variations that are typical of large volume production. Easy to Maintain Maintaining uptime is critical so we have simplified operation and maintenance. A sight glass provides visual indication of status when cold or hot and under vacuum. A gauge port facilitates system troubleshooting. Robust Boiler Design Through optimized boiler design, Agilent...

Typical Applications Courtesy of Mill Lane Engineering Courtesy of Materials Research Furnaces, Inc. As the worldwide diffusion pump market leader, Agilent produces the most comprehensive family of pumps, ranging from 2 in. to 35 in. in diameter, and is the only broad-line, U.S.-based manufacturer. Diffusion pumps are in wide use because they have several advantages: They are reliable, simple in design, operate without noise or vibration, and are relatively inexpensive to operate and maintain. In fact, diffusion pumping is still the most economical means of creating high-vacuum environments....

Diffusion Pumps DIFFUSION Pumps Vacuum Furnaces for large area coating systems. The large pumps used in this application come equipped with sight glass and drain assemblies and are also available with ASA or ISO flanges. Vacuum furnace applications require pumps that are capable of achieving stable pressures in high gas flow environments. Additionally, furnace operators need shorter cycle times to accomplish efficient processing of heat-treated material batches. Coatings (Optical, Electronics, Protective) With low ultimate pressure, high speed, high throughput and high tolerable forepressure,...

Maximum forepressure, Torr (mbar) No load Full load Maximum throughput, T-l/s (mbar-l/s) In operating range @ 1 x 10-2 Torr (1.3 x 10-2 mbar) Warmup time, minutes Cooldown time, minutes with quick cool coil, where applicable Previous model number Pumping speed*, l/s (operating range) Air Helium & hydrogen Pumping speed AVS 4.1 (1963)* Minimum recommended backing pump for maximum throughput, cfm (m3/hr) Backstreaming rate at inlet flange mg/cm2/min (standard cold cap)* Fluid charge Electrical requirements Power, watts Cooling water, U.S. gpm (l/hr) at 60-80 °F (15-26 °C) *For descriptions of pumping...

DIFFUSION PUMPS

Pump Models Dimensions: inches (millimeters) Technical Specifications Pumping speed*, operating range 65 l/sec air, 90 l/s He and H2 Maximum throughput 0.19T-l/s (0.25 mbar-l/s) in operating range, 0.30T-l/s (0.40 mbar-l/s) @ 0.01 Torr Compression ratio 4 x 107 (air), 2 x 106 (helium) Operating range 3 x 10-3 to <5 x 10-8 Torr (3.9 x 10-3 to 6.5 x 10-8 mbar) Maximum forepressure load: 0.75 Torr (1.00 mbar) No Full load: 0.60 Torr (0.78 mbar) Backstreaming rate** With cold cap: <2 x 10-4 mg/cm2/min With baffle: <2 x 10-5 mg/cm2/min Recommended backing pump ≥1.5 cfm (2.5 m3/hr) Warmup time 7 minutes...

DIFFUSION Pumps AX-65 - Pumping Speed - Air/N2 0.75 0.60 Throughput (Torr-l/sec) Inlet pressure (Torr) Pumping speed/Halo baffle Diffusion Pumps Ordering Information Description Wt. kg (lbs) Part Number KF-50 ISO-6 AX-65 with standard cold cap, 3.6 (8.0) L9670301 L9707301   115 V, 250 W AX-65 with internal baffle, 3.6 (8.0) L9670311 L9707311   115 V, 250 W AX-65 with standard cold cap, 3.6 (8.0) L9670302 L9707302   220 V, 250 W AX-65 with internal baffle, 3.6 (8.0) L9670312 L9707312   220 V, 250 W AX-65 with standard cold cap, 3.6 (8.0) L9670303 L9707303   115 V, 200 W AX-65 with internal baffle,...

Pump Models Dimensions: inches (millimeters) Technical Specifications Pumping speed, operating range 160 l/s air, 200 l/s He and H2 Pumping speed*, AVS 4.1 (1963) 285 l/s air Maximum throughput 0.60 T-l/s (0.80 mbar-l/s) in operating range, 0.70 T-l/s (0.93 mbar-l/s) @ 0.01 Torr Operating range 3.7 x 10-3 to < 5 x 10-8 Torr, (4.9 x 10-3 to < 6.5 10-8 mbar) Maximum forepressure load: 0.55 Torr (0.71 mbar) No Full load: 0.40 Torr (0.52 mbar) Recommended backing pump ≥ 5 cfm (8.5 m3/hr) Backstreaming rate**, standard cold cap < 1 x 10-3 mg/cm2/min Warmup time 15 minutes Cooldown time 10 minutes...

DIFFUSION Pumps HS-2 Pumping Speed - Air/N2 Throughput (Torr-l/sec) Inlet pressure (Torr) Diffusion Pumps Pumping speed Ordering Information Description With standard cold cap, 120 V 20.0 (9.0) With standard cold cap, 240 V 20.0 (9.0) Replacement Parts (one heater required per pump) 350 W, 120 V heater (HS2A) 1.0 (0.5) 350 W, 240 V heater (HS2A) 1.0 (0.5) 450 W, 120 V heater 1.0 (0.5) 450 W, 240 V heater 1.0 (0.5) Heater block (one required per pump) 1.0 (0.5) Heater platen (one required per pump) 1.0 (0.5) Replacement o-ring kit, (5 Inlet flange 1.0 (0.5)   o-rings (butyl 2-338)) Description...

Pump Models Dimensions: inches (millimeters) Technical Specifications Pumping speed*, operating range 750 l/s air, 940 l/s He/H2 Pumping speed*, AVS 4.1 (1963) 1,200 l/s air Maximum throughput 1.5 T-l/s (2.0 mbar-l/s) in operating range, 2.5 T-l/s (3.2 mbar-l/s) @ 0.01 Torr Operating range 2 x 10-3 to <5 x 10-9 Torr (2.7 x 10-3 to <6.5 x 10-9 mbar) Maximum forepressure load: 0.65 Torr (0.86 mbar) No Full load: 0.55 Torr (0.73 mbar) Recommended backing pump ≥10 cfm (17 m3/hr) Backstreaming rate**, standard cold cap <5 x 10-4 mg/cm2/min Warmup time 10 minutes Cooldown time 10 minutes (with quick...