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Rotary Stages: Precision in Motion

Rotary Stages: Precision in Motion
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Rotary Stages Precision in Motion

WORLD HEADQUARTERS Email: sales@aerotech.com Jupiter House, Calleva Park Aldermaston, Berkshire Email: sales@aerotech.co.uk Aerotech GmbH Email: sales@aerotechgmbh.de Kitahoncho Funabashi-shi Email: sales@aerotechkk.co.jp Aerotech China China Merchants Tower, 168 - 200 Connaught Road Central, Hong Kong Email: saleschina@aerotech.com Aerotech Taiwan Taipei City Email: wyeh@aerotech.com Air Bearing, Direct-Drive Rotary Stages Mechanical Bearing, Direct-Drive Rotary Stages Mechanical Bearing, Gear-Drive Rotary Stage Aerotech France Email: sales@aerotech.co.uk 2 Copyright© 2011, Aerotech, Inc....

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Aerotech Precision Rotary Stages Aerotech manufactures a large selection of rotary stages including direct-drive models that use our own brushless rotary servomotors, as well as worm-gear-driven models. Stages are available with many different size apertures, table diameters and mounting options to provide the ideal solution for your industrial automation application. Wobble and runout performance are outstanding. Aerotech's stages are used in industrial robots, fiberoptics and photonics, vision systems, machine tools, assembly, semiconductor equipment, medical component laser machining,...

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Air Bearing, Direct-Drive Rotary Stage • High torque output, direct-drive, slotless, brushless servomotor • Zero cogging motor for outstanding velocity * Outstanding error motion and wobble • Direct coupled, high-accuracy rotary encoder • Large diameter clear aperture ABRT series rotary air-bearing stages provide superior angular positioning, velocity stability, and error motion performance along with impressive payload capacity and outstanding radial and axial stiffness. The ABRT is designed to meet the exacting requirements of DVD mastering, wafer inspection, high precision metrology...

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ABRT-150 60° 20 H6 APERTURE 75 B.C. 50 B.C. M5x0.8 THD. X 7.5 DP. (12) PLACES AS SHOWN 105 SQ. 125 SQ. 7 DRILL THRU 11 C'BORE AS SHOWN (4) PLACES STAGE MOUNTING HOLES M6x1 THD. X 9 DP. (4) PLACES AS SHOWN 137 REFERENCE SCALE 100 TABLETOP DIMENSIONS - MILLIMETERS 145.8 SQ. M6x1 THD. X 6 DP. (4) PLACES ON EACH SIDE 50 15 60 135 82.5 50 176.2 37.5 6.5 FEEDBACK AND MOTOR POWER CONNECTORS 65 AIR INLET FITTING FOR 4MM OR 5/32" OD TUBING ABRT rotary air-bearing stages feature a large payload and outstanding radial and axial stiffness. 5

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Air Bearing, Direct-Drive Rotary Stage • Direct-drive, slotless, brushless servomotor • Zero cogging motor for outstanding velocity * Outstanding error motion and wobble • Direct coupled, high accuracy rotary encoder • Low profile, planar design ABRS series rotary air-bearing stages provide superior angular positioning, velocity stability and error motion performance in an exceptionally low-profile package. The ABRS is designed to meet the exacting requirements of wafer inspection, high precision metrology, x-ray diffraction systems, optical inspection and fabrication and...

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Mechanical Bearing, Direct-Drive Rotary Stage • High torque output, direct-drive, brushless servomotor • Cog-free design for outstanding velocity stability • Outstanding wobble and runout • Direct coupled, high-accuracy rotary encoder • Large diameter clear aperture ADRT series direct-drive rotary stages provide superior angular positioning and velocity control in applications ranging from indexing to high-speed laser machining to precision wafer inspection. Dual large-diameter bearings are used to maximize performance with respect to wobble, moment stiffness and repeatability. The large...

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Stage Mounting Holes 8 Places Equally Spaced T-Slot, Typical 8 Places 4 Places on Each Side BRAKE OPTION Motor Connector Feedback Connector

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Mechanical Bearing, Direct-Drive Rotary Stage • High torque output, direct-drive, brushless • Cog-free slotless motor design for outstanding velocity stability • Direct coupled, high-accuracy rotary • Ultra-low-profile minimizes working height The design of the ADRS series direct-drive rotary stage was optimized to minimize stage height. The low profile of the stage reduces the effective working height of the system minimizing "stack-up" related errors. In addition to the low overall height, the ADRS series provides a clear aperture that can be used for product feed-through or laser beam...

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STAGE MOUNTING HOLES DIMENSIONS - MILLIMETERS [INCHESl BOTH SIDES throughput of the ADRS series provide a stage that yields the lowest total cost of ownership.

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Mechanical Bearing, Direct-Drive Rotary Stage • Axial load capacity up to 450 kg • Incremental or absolute encoders * Large bearings provide high payload and moment load capacity • 375-800 rpm continuous rotation speed • Seven models are available, each with either 50,75 or 100 mm clear aperture APR series direct-drive rotary stages are excellent for high-accuracy rotary positioning. The precision- machined and ground stage parts coupled with high-precision angular contact bearings result in exceptionally low error motions, accuracy errors and repeatability errors. In addition, high...

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Mechanical Bearing, Direct-Drive Rotary Stage * 5 different aperture sizes: 100 mm, • Continuous or limited travel • Axial load capacity up to 595 kg * Large bearings provide high payload and moment load capacity • Excellent accuracy and repeatability • No accuracy changes over time from gear wear * 45-300 rpm continuous rotation speed • Vac IO6 torr compatible versions 1. Resolution assumes -AS encoder with 2000X controller multiplication. 2. The ALAR-LP base must be fully supported by a rigid mounting plate to achieve this moment load. 3. Accuracy assumes calibration. Aerotech's ALAR...

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1. Resolution assumes -AS encoder with 2000X controller multiplication. 2. The ALAR-LP base must be fully supported by a rigid mounting plate to achieve this moment load. 3. Accuracy assumes calibration.

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ALAR-325-LP M8 8 8X ON B.C. 350 B.C. 600 4X 9 THRU ALL 15 64 325 CLEAR APERTURE 400 Sq. 525 Sq. 390 115 WITH LIMITS 98 100 FRONT VIEW BACK VIEW (NOT A PROJECTED VIEW) Optional adapter plates are available. 17

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