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QNP-L Series Single-Axis Linear Piezo Nanopositioning Stages
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Catalog excerpts

QNP-L Series Single-Axis Linear Piezo Nanopositioning Stages - 1

Single-Axis Linear Piezo Nanopositioning Stages Travel ranges from 100 μm to 600 μm available High-precision, frictionless flexure guidance system Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor options Mounting compatibility with other QNP-series piezo nanopositioners Open-loop and vacuum versions Aerotech’s QNP-series of piezo nanopositioning stages offer sub-nanometer-level performance in a compact, high-stiffness package. A variety of travel (100 µm to 600 µm) and feedback options make this the ideal solution for applications ranging from microscopy to optics alignment. High Quality in a Compact Package The QNP piezo stages are guided by precision flexures that are optimized using finite element analysis to ensure high-stiffness and long device life. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response. Furthermore, these stages have been designed to provide excellent geometric performance (straightness and angular errors) while at the same time minimizing the overall stage package size. Aerotech’s QNP-L series of single-axis piezo nanopositioners offer closed-loop travel options of 100, 250 and 500 µm. QNP-L Series Long device lifetime Linear Piezo Stages QNP-L Series High-resolution and Positioning Accuracy All of the QNP piezo stages have the option of closed-loop feedback using a unique capacitive sensor design that allows for sub-nanometer resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly enabling superior accuracy and repeatability. Ultra-Precision Control When coupled with Aerotech’s Q-series of controllers and drives, the QNP piezo nanopositioning stages demonstrate subnanometer positioning resolution and in-position stability (jitter), and high-positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation and Command Shaping, providing improved tracking errors and faster stepand-settle times. Automatic parameter and calibration identification is accomplished using Aerotech’s FlashConfig feature. The stage is automatically identified and all operational parameters including axis calibration data are uploaded into the controller ensuring safe, accurate and true “plug-and-play” operation. Design Flexibility Aerotech’s QNP piezo stages are available with capacitance sensor feedback or without feedback (open-loop). Open-loop provides a cost-effective option for applications where compact size, high-dynamics and sub-nanometer positioning resolution are required, but absolute positioning accuracy and repeatability are not required. Open-loop designs can also be used where the piezo position is controlled via an external feedback source (interferometer, vision system, photodetector, etc.). QNP-40-100L 0.5 nm bidirectional step plot measured with an external ultra-precision capacitance sensor. All sizes of the QNP-L stage series offer exceptional sub-nm mechanical step capability. An optional mounting plate provides direct mounting to English or metric breadboard optical tables. The QNP-series also includes XY and Z stages in which common travels mount together with adapter plates. All QNP piezo stages are available in vacuum-prepared versions upon request.

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QNP-L Series Single-Axis Linear Piezo Nanopositioning Stages - 2

Linear Piezo Stages QNP-L SPECIFICATIONS Mechanical Specifications Closed-Loop Travel Closed-Loop (Integrated Feedback) QNP-L Series Resonant Frequency (50 Gram Load)(6) Push/Pull Capacity (In Direction of Motion)(7) Stage Mass MTBF (Mean Time Between Failure) Notes: 1. Value ±10%. 2. See Piezo Engineering Reference section 4.2 for description of resolution. 3. Certified with each stage (closed-loop feedback models only). 4. Measured approximately 15 mm above the carriage by an external metrology device. See Piezo Engineering Reference section 4.1 for description of linearity...

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QNP-L Series Single-Axis Linear Piezo Nanopositioning Stages - 3

QNP-L Series DIMENSIONS Linear Piezo Stages E 6.2 CABLE EXIT (1.5 M LENGTH) QNP-L Series (STAGE SHOWN AT MID-TRAVEL) STAGE -MP (MOUNTING PLATE, BREADBOARD) 25.4 BREADBOARD MOUNTING PATTERN 4X M6 OR 1/4 BOLT C'BORE SLOT DIMENSIONS: MILLIMETERS

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