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Nanopositioning

Nanopositioning
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LINEAR • ROTARY • VERTICAL LIFT AND Z • GONIOMETER www.aerotech.com Dedicated to the Science of Mot

You don’t have to sacrifice long travel for nanometer resolution and accuracy. ANT95-L Single-Axis Linear Stage Noncontact, non-cogging, frictionless direct-drive – zero backlash or hysteresis High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) In-position stability of <1 nm ANT95-50-L-PLUS 1 nm step plot Anti-creep crossed-roller bearings High dynamic performance Available in X, XY, XYZ and many other combinations The ANT95-L series offers 25, 50, 75 or 100 mm travel. ANT95-XY Dual-Axis Linear Stage Integrated, low profile, XY linear-motor stage Noncontact, non-cogging,...

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ANT130-L Single-Axis Linear Stage The ANT130-L series offers 35, 60, 110 or 160 mm travel. Noncontact, non-cogging, frictionless direct-drive – zero backlash or hysteresis High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) Anti-creep crossed-roller bearings High dynamic performance Large selection – 4 different travel options 11 10 9 ANT130-XY Dual-Axis Linear Stage Integrated, low profile, XY linear-motor stage Noncontact, non-cogging, frictionless direct-drive – zero backlash or hysteresis High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) Anti-creep...

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High performance in large travels Outstanding error motion specifications 0.005 arc-second in-position stability 3 arc-second accuracy 1.5 arc-second bi-directional repeatability Multi-axis configurations The ANT<?5_R and ANT130-R offer both limited and unlimited travels. ANT-20G-90 0.25 prad or 0.05 arc sec step size 2.25 2.0 1.75 ANT-20G Goniometers Noncontact, non-cogging, frictionless direct-drive for zero backlash or hysteresis High speed (150°/s) High resolution (0.05 arc second) Excellent in-position stability Large angular range - 20° of travel Orthogonal mounting of two cradles...

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Nanometer performance in a large travel format High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm) Anti-creep crossed-roller bearings High dynamic performance The ANT95-L-Z is available with 25 or 50 mm travel. The ANT130-L-Z is available with 35 or 60 mm travel. Nanometer performance in a large travel format In-position stability of <1 nm 3 or 5 mm travel 200 nm accuracy Anti-creep crossed-roller bearings High dynamic performance The ANT95-3-V and ANT130-5-V both offer 200 nm accuracy.

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Dedicated to the Science of Motion Aerotech’s Worldwide Sales and Service Locations ★ - Aerotech Headquarters ● - Direct Field Sales Office ▲ - Aerotech Subsidiary ■ - Representative

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