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Motion and Automation for Test, Measurement and Inspection

Motion and Automation for Test, Measurement and Inspection
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Motion and Automation for Test, Measurement and Inspection - 1

Surface Profiling Test, Measurement, and Inspection Semiconductor Inspection and Metrology Sensor Testing Cleanroom and High Vacuum Systems Machine Automation

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Motion and Automation for Test, Measurement and Inspection - 2

Since 1970, Aerotech has been dedicated to developing solutions for the test, measurement, and inspection industry. Our expertise includes systems for shop floor, R&D, vacuum, and cleanroom environments. Our ability to provide custom-engineered products and systems to end users, integrators, and high-volume OEMs is unmatched, and our products deliver quality, performance, flexibility, and the highest return on investment. Sensor Testing- • Single- and multi-axis rate tables • Motion simulator software • Advanced control techniques • Excellent rate and in-position stability Surface...

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Motion and Automation for Test, Measurement and Inspection - 3

Semiconductor Inspection and Metrology • Ellipsometry, scanning white light interferometry, stylus measurements • High-performance linear motor stages • Low profile direct-drive vertical and rotary stages • Vacuum chuck options with integrated leveling mechanisms • Linear and PWM digital controllers Vacuum and Cleanroom Systems • Satellite inertial navigation system testing • Scanning electron microscopy • Optics polishing • Vacuum options for 10-3 to <10-7 Torr • Experience with vacuum applications Machine Automation • Stand-alone and PC-based controllers • PLC and motion integration with...

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Motion and Automation for Test, Measurement and Inspection - 4

Sensor Testing

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Motion and Automation for Test, Measurement and Inspection - 5

Applications • Accelerometers • Gyroscopes • MEMS calibration • Inertial measurement units SingLe- and muLti-axis systems Aerotech has multiple solutions for the testing and calibration of inertial sensors. ALL are designed to induce sinusoidal excitations, accelerations, and positions for the testing and calibration of accelerometers, gyroscopes, inertial navigation systems, fiber optic gyros, and inertial measurement units. When coupled with our state-of-the-art controllers, highly-repeatable testing and calibration are assured. Features and Benefits • High accuracy, direct-drive motion...

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Motion and Automation for Test, Measurement and Inspection - 6

Inertial Sensor Testing and Calibration Single-axis rate-table solutions Precision DirectDrive Rotary Position and Rate Tables • High-capacity angular contact bearings or air bearings • High-resolution position encoders • Highly accurate closedloop control • Brushless, slotless motors for smooth motion with no cogging • Large selection of integrated, low-noise slip rings for customer signals and power Position error without harmonic cancellation Position error with harmonic cancellation • Multiple motor types for high speed or high-torque configurations • Excellent error motion performance...

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Motion and Automation for Test, Measurement and Inspection - 7

Motion Simulator User interface for 1, 2, or 3-axis motion simulators Motion Simulator is an easyto-use Windows®-based program for creating simple and advanced motion stimuli for testing and calibrating inertial sensors and systems. The Aerotech Motion Simulator software includes all controls for manually or automatically running one to three-axis motion simulations. Features and Benefits • Graphical motion profile importing (Position, Velocity, Acceleration, Time) Main screen provides manual control • Position Synchronized Output (PSO) for real-time event triggering • Trajectory tracking...

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Motion and Automation for Test, Measurement and Inspection - 8

Motion Simulator Track • With the tracking functionality you can treat an analog input as either a position or velocity command, and track a signal from an external sensor or profile generation tool • Available for each active axis • Configurable sampling time Track page provides real-time input controls for servo tracking of position or velocity inputs Data Analysis • Extensive analysis tools are built-in and easily accessible through the Data Analysis tab • Options for overlapping data by axis or signal • Single or continuous data collection modes • Frequency comparison function for...

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Motion and Automation for Test, Measurement and Inspection - 9

Motion Simulator A variety of rotary configurations for sensor testing ARMS series • Up to 500 lb (227 kg) payload capacity • Unloaded acceleration >20,000°/s2 • Minimum rate 0.001°/s Area for mounting multiple UUTs (Unit Under Test) on our large tabletops for simultaneous testing UUT power and signals route through slip rings PC and Npaq or HLe rack-mount control operation via Aerotech Motion Simulation package High Speed Rotation or Oscillation Tilt Motion Single-Axis ARMS Series Rate Tables • Single-axis configurations include optional free standing, high stiffness pedestal with leveling...

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Motion and Automation for Test, Measurement and Inspection - 10

Motion Simulator Two-axis rate table with integrated electronics Smooth motion from non-cogging brushless, slotless motors Continuous Yaw ESTOP remote for flexible safety locations Integrated lownoise slip rings Granite base for stable support Continuous Roll Ultra-stiff design Industrial rack-mount PC with A3200 Motion Controller, Motion Designer, and Motion Simulator software packages installed Welded steel machine frame Linear amplifiers integrated into rack-mount shelf to minimize system footprint

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Motion and Automation for Test, Measurement and Inspection - 11

Motion Designer Graphically design your motion profile – no coding required Motion Designer is used to graphically design your motion profile. Motion Designer is used to graphically generate and edit motion profiles and to import, run, and evaluate motion profiles (trajectories). Features and Benefits • Graphically create and modify multi-axis trajectories from predefined building blocks • Run a trajectory, plot collected data, and use analysis tools • Apply learning algorithms • Export trajectory to an external file • No need to write code • Fast implementation aerot

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Motion and Automation for Test, Measurement and Inspection - 12

Motion Designer Fast and effecient trajectory generator Create complex trajectories by combining linear and periodic motion profiles. Iterative Learning Control reduces following error and cycle time, thereby increasing machine throughput. Generate various pre-defined periodic waveforms. Overlap data collected from multiple runs of a trajectory. Single-axis ARMS stage on mounting pedestal A3200 Automation Controller with Motion Designer add-on

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