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AVS, AVSI100

AVS, AVSI100
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Vertical Translation Stage Long-life linear guide bearing system Submicron closed-loop positioning Vertical Lift Stages Low-cost high performance stage 6, 13, and 25 mm travel models Precision-ground ball screw Integral or removable motor Aerotech’s AVS100/AVSI100 series stages offer the ideal solution for applications that require very small incremental movements in elevation above a horizontal plane. Low profiles and precise motion capability make these stages ideal for use in semiconductor wafer inspection and testing, fiberoptics assembly and inspection, automated tool alignment, machine vision inspection systems, and laser machining applications. The AVSI100 series stages provide identical performance to the AVS100 stages, but in an even smaller footprint. The AVSI100 integrates the motor directly with the drive screw with no motor coupling. This makes the stage significantly shorter in length. Quality Design Provides Superior Performance The AVS100/AVSI100 series provides precise elevation of a load in a vertical plane using a moving wedge design. The precision machined wedge block converts horizontal movement from a precision-ground ball screw to vertical elevation of the AVS100/AVSI100 series tabletop. Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability, long life, and smooth, precision motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is ensured. Careful design of the wedge angle and bearing system allows the AVS100/AVSI100 series to achieve submicron resolution and still maintain a compact profile. The optional HALAR factory calibration option is available to further increase standard accuracy and repeatability. A Better Approach to Vertical Motion The vertical lift approach offers an alternative to traditional Z-plane oriented stages. Not only do the AVS100/AVSI100 series stages offer a lower profile, but the load can also be accessed easily from any side. And by centering the payload over the bearings, there are no cantilevering effects. The AVS100/AVSI100 series stages provide a space-saving alternative to traditional XYZ systems and are equally suited to laboratory and industrial applications. Optional stage finishes are available for various environments, including vacuum preparation. Additional Standard Features All AVS100/AVSI100 series stages are equipped standard with integral limit switches and mechanical hard stops. The stage tabletop is treated with a Teflon®-impregnated hardcoat (Rockwell 62 hardness) that is scratch-resistant and provides outstanding protection in the harshest environments. The stage itself has a black anodize finish. Motor and Drives The AVS100/AVSI100 series includes Aerotech's high performance NEMA 23 frame-size BMS series brushless, slotless servomotor. The slotless motor has zero cogging and therefore is optimized for applications requiring very smooth motion. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution. WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk Aerotech GmbH, Germany • Phone: +49-911-9679370 • Email: sales@aerotechgmbh.de Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: sales@aerotechkk.co.jp Aerotech China • Phone: +852-3793-3488 • Email: saleschina@aerotech.com

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Vertical Lift Stages AVS100/AVSI100 Series SPECIFICATIONS Basic Model Travel Drive System Precision Ball Screw/Brushless Ser vomotor (BMS60-A-D25-E1000H) Bus Voltage Continuous Current 1000-line driver output encoder (AVS) 1000-line amplified sine output encoder (AVSI) 2500-line line driver output encoder (AVSI) 0.53 µm @ 4000 steps/rev motor resolution 0.2 µm @ 10,000 steps/rev motor resolution Maximum Travel Speed Effective Lead Maximum Load(1) Accuracy Repeatability (Bidirectional) Straightness and Flatness (Maximum Deviation) Pitch and Roll Nominal Stage Weight (With Motor) Construction...

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DIMENSIONS - MILLIMETERS [INCHES] STAGE MOUNTING HOLES MOTOR MOUNTING STAGE MOUNTING HOLES WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone:+1-412-963-7470 • Email: sales@aerotech.com WWW 36T0t6Ch COm Aerotech, Ltd., United Kingdom • Phone: +44-1 18-9409400 • Email: sales@aerotech.co.uk 469 Aerotech G m ID I I, G e rm a ny * Phone. + 49-91 1 -9679 3 70 * EmciiLsci 10 s @c 0 rotechcimloh.cle A©rot©ch KK, Japan • Phone:+81-47-489-1741 • Email: sales@aerotechkk.co.jp Aerotech China • Phone: +852-3793-3488 • Email: saleschina@aerotech.com

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Vertical Lift Stages 7.0 THRU STAGE MOUNTING HOLES (4 PLACES) NEMA 23 MOTOR WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk Aerotech GmbH, Germany • Phone: +49-911-9679370 • Email: sales@aerotechgmbh.de Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: sales@aerotechkk.co.jp Aerotech China • Phone: +852-3793-3488 • Email: saleschina@aerotech.com

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Vertical Lift Stages 203.3 7.0 THRU STAGE MOUNTING HOLES (4 PLACES) WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk Aerotech GmbH, Germany • Phone: +49-911-9679370 • Email: sales@aerotechgmbh.de Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: sales@aerotechkk.co.jp Aerotech China • Phone: +852-3793-3488 • Email: saleschina@aerotech.com

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Vertical Lift Stages AVS100 Series ORDERING INFORMATION Ordering Example AVS1 Series Vacuum Preparation Mounting and Grid Pattern AVS100 Series Vertical Translation Stage AVS106 AVS113 AVS125 6 mm (0.25 in) travel stage with limits 13 mm (0.5 in) travel stage with limits 25 mm (1 in) travel stage with limits Stage Construction Options /VAC3 /VAC6 Vacuum preparation of stage to 10-3 torr Vacuum preparation of stage to 10-6 torr Mounting and Grid Pattern -M Metric dimension mounting pattern and holes Brushless servomotor with connectors and 1000-line line driver output encoder....

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