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ANT95-XY ULTRA
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Catalog excerpts

ANT95-XY ULTRA - 1

Two-Axis XY Direct-Drive Nanopositioning Stages NANO Technology nano Motion Technology Integrated low profile XY linear motor stage ANT95-XY-ULTRA Series 25 mm x 25 mm or 50 mm x 50 mm travel Nanometer-level performance in a large travel format 2D system accuracy is 250 nm In-position stability of <1 nm High dynamic performance ULTRA Trajectory Management System Aerotech’s ANT95-XY-ULTRA is a long travel (up to 50 mm x 50 mm) nanopositioner for XY applications. Each axis uses crossed-roller bearings, as well as Aerotech’s unique directdrive for non-cogging, zero backlash motion. In addition, each stage receives a two-dimensional correction to achieve unmatched nanometer resolution, accuracy, and repeatability. This unique drive and bearing combination, packaged in an extremely low profile and small footprint, offers tangible advantages in your motion application. In order to achieve the highest possible system accuracy from our multi-axis nanopositioning systems, Aerotech has developed an advanced, interactive, dynamic trajectory management system. To take advantage of this sophisticated interactive calibration system, the mechanical system has to be completely assembled and functionally tested prior to calibration in our best-in-class metrology labs. Nano-level system accuracy can only be achieved under stringent environmental conditions, calibrating with the best test equipment, and utilizing the formidable capability of ULTIMUS. By implementing the ULTIMUS dynamic trajectory management system with the ANT95-XY-ULTRA, we are able to produce 2-dimensional accuracies of ±250 nm or better. ANT95-50-XY 2D accuracy plot showing planar accuracy error including straightness, orthogonality, and stage yawing. The plots below illustrate performance differences between a standard ANT95-XY and the -ULTRA version. Straightness errors, orthogonality errors, and accuracy errors caused by stage yawing are virtually eliminated. The ANT95-XY-ULTRA extends the performance capability of Aerotech’s ANT95-XY stage series to levels found nowhere else. The exceptional geometric and dynamic performance of the ANT95-XY-ULTRA make it an ideal choice for nearly all high-end motion applications in the lab or in production environments. ANT95-50-XY-ULTRA – exceptional 2D system accuracy with Aerotech’s ULTRA version.

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ANT95-XY ULTRA - 2

NANO Technology ANT95-XY-ULTRA Series SPECIFICATIONS Mechanical Specifications Repeatability (Uni-Directional) 4.5 g - 45 m/s2 (No Load) (Upper Axis) 2.75 g - 27 m/s2 (No Load) (Upper Axis) Orthogonality Maximum Speed Maximum Acceleration See graph for typical performance Speed Stability See graph for typical performance Settling Time In-Position Stability(2) Upper Axis Lower Axis Maximum Force (Continuous) Load Capacity(3) Moving Mass Stage Mass 3.2 kg (7 lb) Aluminum Body/Black Hardcoat Finish MTBF (Mean Time Between Failure) Notes: 1. Certified with each stage. 2. In-Position Jitter...

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ANT95-XY ULTRA - 3

Step Size: 25 mm Speed: 500 mm/s Settle Spec: 20 nm ANT95-25-XY-ULTRA velocity performance at 100 mm/s and 1 kg payload for the X (lower) axis. This outstanding speed stability enhances most scanning or laser machining applications. ANT95-25-XY-ULTRA step and settle performance at full travel and 1 kg payload for the X (lower) axis. Industry-best settling times significantly improve throughput for most applications. Standard Ultra ANT95-25-XY-ULTRA lower axis, 1 nm step plot. Best-in-class resolution and exceptional in-position stability for large travel stages. ANT95-25-XY straightness...

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ANT95-XY ULTRA - 4

NANO Technology ANT95-XY-ULTRA Series 37.5 TYP LOWER AXIS MOTOR FEEDBACK PIGTAIL ~1M[3.3FT] UPPER AXIS MOTOR FEEDBACK PIGTAIL ~1M[3.3FT] 13 1/2 LIMIT TRAVEL 12.5 1/2 NORMAL TRAVEL 13 1/2 LIMIT TRAVEL 14 1/2 HARDSTOP TRAVEL 2.5 TYP 12.5 TYP 75 CUSTOMER MOUNTING 4X 4.8 THRU (CLEARANCE FOR M4 SHCS) DIMENSIONS: MILLIMETERS

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ANT95-XY ULTRA - 5

NANO Technology 45 TYP LOWER AXIS MOTOR FEEDBACK PIGTAIL ~1M[3.3FT] 26.5 1/2 HARDSTOP TRAVEL 25 1/2 NORMAL TRAVEL UPPER AXIS MOTOR FEEDBACK PIGTAIL ~1M[3.3FT] 2.5 TYP 20 TYP CUSTOMER MOUNTING 8X 4.8 THRU (CLEARANCE FOR M4 SHCS) DIMENSIONS: MILLIMETERS

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ANT95-XY ULTRA - 6

STAGE MOUNTING 4X M4x0.7 THRU NANO Technology ANT95-25-XY-ULTRA/ANT95-50-XY-ULTRA Mounting Plate DIMENSIONS BREADBOARD MOUNTING PATTERN 4X M6 OR 1/4 BOLT C'BORE SLOT STAGE MOUNTING 4X M4x0.7 THRU DIMENSIONS: MILLIMETERS BREADBOARD MOUNTING PATTERN 4X M6 OR 1/4 BOLT C'BORE SLOT DIMENSIONS: MILLIMETERS ANT95-XY-ULTRA Series ORDERING INFORMATION ANT95-XY-ULTRA Series Linear Stage ANT95-XY-ULTRA Aerotech nanotranslation crossed-roller linear positioner with 2D calibration Linear Stage Travel ANT95-25-XY-ULTRA ANT95-50-XY-ULTRA Options -MP 25 mm (1 in) XY travel stage with proprietary...

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