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ANT-20G
8Pages

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Catalog excerpts

ANT-20G - 1

NANO Technology ANT-20G Series nano Motion Technology Direct-Drive Goniometers Noncontact, non-cogging, frictionless directdrive for zero backlash or hysteresis High speed (150°/s) High resolution (0.05 arc second) Excellent in-position stability Large 20° rotation angle Compact design Aerotech’s ANT-20G goniometers represent a significant breakthrough in the high-accuracy angular alignment of components. This unique design utilizes Aerotech’s best-inclass direct-drive noncontact motor technology. When used with Aerotech’s controllers, the ANT-20G series provides an industry-leading positioning speed of 150 degrees per second. High-precision bearings, direct on-axis encoder feedback, and noncontact and noncogging direct-drive technology assure the highest level of performance and make excellent repeatability and in-position stability a reality. The goniometer cradles can be mounted orthogonally to provide pitch and roll about the same point in space. Combining this with a rotary stage under the orthogonal assembly adds a third rotation axis (pitch, roll, yaw) through the same point. The critical elements of the ANT-20G goniometers, as with all other ANT series nanopositioners, were selected to operate in a 24/7 manufacturing environment. Unlike worm- or piezodriven goniometers, the ANT-20G series will not require periodic adjustment or maintenance. This will assure many years of trouble-free operation. The ANT-20G cradles are available in four sizes. ANT-20G-90 0.25 µrad or 0.05 arc sec step size Clockwise from upper left: ANT-20G-50 mounted in an orthogonal configuration with an ANT-20G-90, ANT-20G-110, and an ANT-20G-160. Position (µrad) Orthogonal mounting of two cradles provides rotation about the same point ANT-20G-90 step plot. Best-in-class resolution and exceptional inposition stability for large angular travel stages.

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ANT-20G - 2

Mechanical Specifications Rotation Angle Repeatability (Uni-Directional) NANO Technology Tilt Error Motion Maximum Acceleration See graph for typical performance Settling Time In-Position Stability(2) Maximum Torque (Continuous) Axial Moment Height from Tabletop to Rotation Point Nominal Radius of Rotation Load Capacity Stage Mass Maximum Speed MTBF (Mean Time Between Failure) Notes: 1. Certified with each stage. 2. In-Position Jitter listing is 3 sigma value. • Specifications are per axis, measured at the rotation point. Performance of multi-axis systems is payload and workpoint dependent....

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ANT-20G - 3

NANO Technology ANT-20G Series ANT-20G Series SPECIFICATIONS Electrical Specifications Slotless, Brushless, Direct-Drive Drive System Noncontact Encoder Limit Switches Near Center Home Switch Recommended Controller Epaq-MXH Epaq MR-MXH Ensemble ML-MXH Soloist ML-MXH Single Axis Npaq-MXR Npaq MR-MXH Ndrive ML-MXH Notes: 1. Linear amplifiers are required to achieve the listed specifications. Other options are available. Position Error (μrad) ANT-20G-90 step and settle performance. Outstanding settling time enhances throughput of most applications. ANT-20G-90 in-position stability. Excellent...

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ANT-20G - 4

All stages shown at center of rotation angle. Mounting surface quality: Flatness = 5 jjm [0.0002 in.] DIMENSIONS - MILLIMETERS [INCHES] STAGE MOUNTING HOLES

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ANT-20G - 5

All stages shown at center of rotation angle. Mounting surface quality: Flatness = 5 jjm [0.0002 in.] DIMENSIONS - MILLIMETERS [INCHES! I STAGE MOUNTING HOLES STAGE MOUNTING HOLES All stages shown at center of rotation angle. Mounting surface quality: Flatness = 5 j^m [0.0002 in. ]

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ANT-20G - 6

All stages shown at center of rotation angle. Mounting surface quality: Flatness = 5 jjm [0.0002 in.] STAGE MOUNTING HOLES

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ANT-20G - 7

All stages shown at center of rotation angle. Mounting surface quality: Flatness = 5 jjm [0.0002 in.] DIMENSIONS - MILLIMETERS [INCHES] TO CENTER OF ROTATION STAGE MOUNTING HOLES STAGE MOUNTING HOLES All stages shown at center of rotation angle. Mounting surface quality: Flatness = 5 j^m [0.0002 in. ]

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ANT-20G - 8

ANT-20G Series Goniometer ANT-20G-50 20 degree angle of rotation goniometer with proprietary direct-drive motor technology, 50 mm radius of rotation, limits, 1 Vpp sinusoidal encoder, 1 meter cable, 25 D connector ANT-20G-90 20 degree angle of rotation goniometer with proprietary direct-drive motor technology, 90 mm radius of rotation, limits, 1 Vpp sinusoidal encoder, 1 meter cable, 25 D connector ANT-20G-110 20 degree angle of rotation goniometer with proprietary direct-drive motor technology, 110 mm radius of rotation, limits, 1 Vpp sinusoidal encoder, 1 meter cable, 25 D connector...

Open the catalog to page 8

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