Catalog excerpts
Linear Stages ALS130H Series Mechanical Bearing, Linear Motor Stage Bi-directional repeatability to 75 nm Direct-drive linear motor for ultra-precise motion High-accuracy noncontact glass scale linear encoder Anti-cage creep cross-roller bearings for smooth motion Outstanding performance in a small footprint 23 N (5.2 lb) continuous force linear servomotor important in alignment applications where step accuracy is critical. Furthermore, the linear motor and high resolution encoder system also provides excellent in-position stability. The ALS130H, with its sub-nanometer resolution, superior bi-directional repeatability, and exceptional low-velocity performance, is the unparalleled solution for high performance test, measurement, inspection, and other demanding applications. Linear Motor Drive Unlike many stages that utilize a side-drive lead screw, the ALS130H employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device, there is no backlash, windup, or "stiction" that is normally associated with a lead screw or ball-screw drive. The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS130H to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-performance stage with outstanding throughput that significantly outperforms comparable high-accuracy screwdriven stages. Exceptional Resolution For alignment applications, outstanding step-to-step resolution is critical. The ALS130H meets this demand with a resolution of 0.5 nm when coupled with Aerotech controls. The direct-drive linear motor allows the ALS130H to make precise, small resolution steps. This is particularly Superior Geometry Aerotech's ultra-stiff construction and compact two-piece design result in a stage with unmatched geometrical tolerances. As a result, straightness and flatness for the standard stage is <±2 µm over the entire travel. Smooth Travel Designed for smooth, vibration-free motion, the ALS130H utilizes precision anti-cage creep cross-roller bearings for outstanding smoothness of motion. Since neither the bearing system nor the drive system utilize any recirculating elements, the ALS130H exhibits the outstanding ripple-free motion required for scanning and inspection applications. Designed for Long Life Like all stages in the Aerotech product family, the ALS130H was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices - they not only exhibit long-life, but are totally maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability. Precision Alignment ALS130H series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and available vertical axis solutions. WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk Aerotech GmbH, Germany • Phone: +49-911-9679370 • Email: sales@aerotechgmbh.de Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: sales@aerotechkk.co.jp Aerotech China • Phone: +852-3793-3488 • Email: saleschina@aerotech.com
Open the catalog to page 1ALS130H Series SPECIFICATIONS Basic Model Linear Brushless Servomotor (BLMUC-95-A) Drive System Bus Voltage Continuous Current Noncontact Linear Encoder Maximum Linear Acceleration Repeatability Straightness and Flatness Linear Stages Total Travel Nominal Stage Weight Moving Mass Maximum Deviation Aluminum Body/Black Anodize Finish Notes: 1. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution. 2. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements. 3....
Open the catalog to page 2X Axis, Carriage Height Center of Travel, 10 nm Commanded Steps ALS130H Resolution: 0.5 nm 20 Linear Stages Y Axis, Carriage Height Center of Travel, 10 nm Commanded Steps ALS130H Resolution: 0.5 nm A3200 controller and NPAQ equipped with DL4010 linear amplifier. WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk Aerotech GmbH, Germany • Phone: +49-911-9679370 • Email: sales@aerotechgmbh.de Aerotech KK, Japan • Phone: +81-47-489-1741 • Email:...
Open the catalog to page 3X Axis, Carriage Height Center of Travel, Jitter ALS130 Stage Enabled Resolution: 0.5nm Time (s) Aerotech Proprietary and Confidential A3200 controller and NPAQ equipped with DL4010 linear amplifier. WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-41 2-963-7470 • Email: sales@aerotech.corr Aerotech, Ltd., United Kingdom • Phone:+44-1 18-9409400 • Email: sales@aerotech.co.uk Aerotech GmbH, Germany • Phone: +49-91 1-9679370 • Email: sales@aerotechgmbh.de Aerotech KK, Japan • Phone:+81-47-489-1741 • Email: sales@aerotechkk.co.jp Aerotech China • Phone: +852-3793-3488 • Email:...
Open the catalog to page 4Linear Stages 130 SQ CUSTOMER MOUNTING SURFACE 75 SQ 50 [2.00] OUTER (4) STAGE MOUNTING HOLES 50 INNER (4) STAGE MOUNTING HOLES D = TOTAL LENGTH @ HARD STOPS 130 C = TOTAL LENGTH @ NOMINAL TRAVEL 6.8 THRU STAGE MOUNTING HOLES TYP - 8 DIMENSIONS - MM[IN] BASIC MODEL TOTAL TRAVEL WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk Aerotech GmbH, Germany • Phone: +49-911-9679370 • Email: sales@aerotechgmbh.de Aerotech KK, Japan • Phone: +81-47-489-1741 •...
Open the catalog to page 5Linear Stages ALS130H Series MOTOR & FEEDBACK PIGTAIL FROM STAGE EXIT 610.0 -B OPTION F 130 SQ CUSTOMER MOUNTING SURFACE C = TOTAL LENGTH @ NOMINAL TRAVEL D = TOTAL LENGTH @ HARDSTOPS 3 C = TOTAL LENGTH @ NOMINAL TRAVEL 6.8 THRU STAGE MOUNTING HOLES TYP - 8 D = TOTAL LENGTH @ HARD STOPS 50 INNER (4) STAGE MOUNTING HOLES 50 [2.00] OUTER (4) STAGE MOUNTING HOLES DIMENSIONS - MM[IN] BASIC MODEL TOTAL TRAVEL WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk...
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