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ABRT

ABRT
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ABRT Series Rotary Stages Air-Bearing Rotary Stage High torque output, direct-drive, slotless, brushless servomotor ABRT Series Zero cogging motor for outstanding velocity stability Outstanding error motion and wobble performance Direct coupled, high-accuracy rotary encoder Large diameter clear aperture No mechanical contact Aerotech’s ABRT series rotary air-bearing stages provide superior angular positioning, velocity stability, and error motion performance along with impressive payload capacity and outstanding radial and axial stiffness. The ABRT is designed to meet the exacting requirements of DVD mastering, wafer inspection, high precision metrology applications, X-ray diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology device fabrication. cogging and torque-ripple-free. This makes ABRT stages ideal for applications requiring smooth scan velocities at low or high speeds. Accurate Positioning An optical encoder is standard with the ABRT. When coupled with Aerotech’s feedback multipliers and controls, resolutions of <0.03 arc second are achievable. Custom Designs Superior Mechanical Design The ABRT design features large air-bearing surfaces and innovative preloading for high stiffness and load capacity, producing not only excellent axial and radial error motions, but outstanding tilt error motion, as well. The resultant performance is significantly better than other rotary airbearing tables and spindles, greatly benefiting applications requiring exceptional planar performance. Furthermore, this stage family provides a clear aperture that can be used for product feed-through, laser beam delivery, cable clearance, or application-specific requirements. Custom versions of the ABRT are available to satisfy rate table and high precision inertial guidance test-stand applications. Other features, such as slip rings and rotary unions, are available. Flexible Configurations Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package. Brushless Direct-Drive To maximize positioning performance, the ABRT series utilizes optimized versions of Aerotech’s S-series slotless, brushless motor. The motor uses an advanced magnetic circuit design to produce high torque output with minimal heat generation. The slotless design is inherently zero- WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk Aerotech GmbH, Germany • Phone: +49-911-9679370 • Email: sales@aerotechgmbh.de Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: sales@aerotechkk.co.jp Aerotech China • Phone: +852-3793-3488 • Email: saleschina@aerotech.com

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ABRT Series SPECIFICATIONS Rotary Stages ABRT Series Tabletop Diameter Total Travel Direct-Drive Brushless Servomotor ABRT Series BEMF, Line-Line, Max Continuous Current, Stall Peak Torque Stall Torque, Continuous Torque Constant Bus Voltage Resolution(1) Fundamental Encoder Resolution Max Speed(2) Accuracy(3) Axial Error Motion (Synchronous) Radial Error Motion (Synchronous) Tilt Error Motion (Synchronous) Axial Error Motion (Asynchronous) Radial Error Motion (Asynchronous) Tilt Error Motion (Asynchronous) Operating Pressure(6) Air Consumption(7) Inertia Total Mass Material Finish <56.6...

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ABRT Series DIMENSIONS Rotary Stages ABRT Series M5x0.8 THD. X 7.5 DP. (12) PLACES AS SHOWN 7 DRILL THRU 11 C'BORE AS SHOWN (4) PLACES STAGE MOUNTING HOLES 105 SQ. 125 SQ. M6x1 THD. X 9 DP. (4) PLACES AS SHOWN 137 REFERENCE SCALE 100 TABLETOP DIMENSIONS - MILLIMETERS M6x1 THD. X 6 DP. (4) PLACES ON EACH SIDE 6.5 FEEDBACK AND MOTOR POWER CONNECTORS AIR INLET FITTING FOR 4MM OR 5/32" OD TUBING WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk Aerotech...

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ABRT Series Rotary Stages ABRT Series DIMENSIONS 7 DRILL THRU 11 C'BORE AS SHOWN (4) PLACES STAGE MOUNTING HOLES DIMENSIONS - MILLIMETERS 187 REFERENCE SCALE 145 TABLETOP M6x1 THD. X 6 DP. (4) PLACES ON EACH SIDE 6.5 FEEDBACK AND MOTOR POWER CONNECTORS WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk Aerotech GmbH, Germany • Phone: +49-911-9679370 • Email: sales@aerotechgmbh.de Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: sales@aerotechkk.co.jp...

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ABRT Series DIMENSIONS Rotary Stages ABRT Series M6x1 THD. X 9 DP. (18) PLACES AS SHOWN M6x1 THD. X 9 DP. (8) PLACES AS SHOWN 150 TYP. 220 TYP. 7 DRILL THRU 11 C'BORE AS SHOWN (4) PLACES STAGE MOUNTING HOLES DIMENSIONS - MILLIMETERS 250 REFERENCE SCALE 200 TABLETOP 260.4 SQ. M6x1 THD. X 6 DP. (4) PLACES ON EACH SIDE 6.5 FEEDBACK AND MOTOR POWER CONNECTORS AIR INLET FITTING FOR 4MM OR 5/32" OD TUBING WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk...

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ABRT Series ORDERING INFORMATION ABRT Series Rotary Stages Ordering Example ABRT Position Transducer ABRT Series Direct-Drive, Air-Bearing, Rotary Stage ABRT-150 ABRT-200 ABRT-260 150 mm wide air-bearing rotary stage with 0.36 N-m continuous torque output 200 mm wide air-bearing rotary stage with 3.7 N-m continuous torque output 260 mm wide air-bearing rotary stage with 6.7 N-m continuous torque output Standard feedback device, sine wave output; 11,840 cycles per rev on ABRT-150; 18,000 cycles per rev on ABRT-200; and 23,600 cycles per rev on ABRT-260 Square-wave digital output; 592,000...

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