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ABL1500

ABL1500
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ABL1500 Series Linear Stages Air Bearing, Linear Motor Stage Designed for high-performance scanning and inspection Active air preload on all air-bearing surfaces Linear encoder feedback provides sub-nanometer resolution High stiffness for heavy loads and excellent geometrical performance Travel up to 500 mm Leading-edge manufacturing, particularly in the semiconductor and data storage industries, demands positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL1500, with its fully active preload, exceptionally high stiffness, and excellent geometric characteristics was designed specifically to meet those demands. Air-Bearing Design for High Dynamic Performance The ABL1500 incorporates an air-on-air preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading. Proprietary manufacturing techniques result in a stage with unsurpassed geometrical characteristics. The air bearing has an inherent averaging effect that maximizes performance. The thin film will fill small surface voids and allow for other irregularities. This characteristic yields superior pitch, roll, yaw, straightness and flatness specifications. unsurpassed smoothness of motion. Capable of generating high force and velocity, the BLMC represents the ultimate combination of power and performance. Zero Maintenance Our totally noncontact air bearing, noncontact linear motor drive, and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL1500 experiences no wear or reduction in performance over time. Service life is virtually unlimited and since there is no lubrication – only clean, dry gas – air bearings are ideal for cleanroom and medical applications. Cable Management We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime. We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate integration into the final system. Both ends are fully connectorized for simple integration into the customer’s machine. Linear Motor Drive The driving force behind this stage is Aerotech’s BLMC series brushless linear servomotor. Aerotech’s long history and experience as a motor manufacturer is reflected in this design. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk Aerotech GmbH, Germany • Phone: +49-911-9679370 • Email: sales@aerotechgmbh.de Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: sales@aerotechkk.co.jp Aerotech China • Phone: +852-3793-3488 • Email: saleschina@aerotech.com

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Mechanical Specifications Linear Stages Maximum Speed Maximum Acceleration Maximum Force (Continuous) Load Capacity(2) Operating Pressure Moving Mass (No Load) 14.7 kg (32.4 lb) Stage Mass MTBF (Mean Time Between Failure) Notes: 1. Certified with each stage. 2. Axis orientation for on-axis loading is listed. 3. Specifications are for single-axis systems measured 25 mm aove the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. 4. To protect air bearing against under-pressure, an in-line pressure switch...

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ABL1500 Series SPECIFICATIONS Electrical Specifications Linear Stages Brushless Linear Servomotor Drive System Noncontact Linear Encoder (see signal period options on Order Information page) Limit Switches Near Center Home Switch Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR Ensemble MP/Ensemble CP/Ensemble HLe/Epaq Soloist MP/Soloist CP/Soloist HLe Multi-Axis Single Axis Horizontal Side Distance of Load C.G. from Tabletop Centerline (mm) Cantilever load performance for the ABL1500. Mass vs. Offset Pitch Acceleration Load For Various Peak Acceleration Values Mass vs. Offset Yaw Acceleration Load...

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Linear Stages ADDITIONAL CABLE TRAY FOR XY-CMS OPTION AIR INLET FITTING FOR 4MM OR 5/32" OD TUBING FEEDBACK AND MOTOR POWER CONNECTORS D A 7.1 THRU 12.7 C'BORE AS SHOWN STAGE MOUNTING HOLES (E) PLACES BASIC MODEL WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk Aerotech GmbH, Germany • Phone: +49-911-9679370 • Email: sales@aerotechgmbh.de Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: sales@aerotechkk.co.jp Aerotech China • Phone: +852-3793-3488 •...

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ABL1500 Series ORDERING INFORMATION Ordering Example 010 Mounting and Grid Pattern Linear Encoder -SINGLE-CMS -XY-CMS Linear Stages 50 mm (2 in) travel linear air-bearing stage with linear motor and limits 100 mm (4 in) travel linear air-bearing stage with linear motor and limits 200 mm (8 in) travel linear air-bearing stage with linear motor and limits 300 mm (12 in) travel linear air-bearing stage with linear motor and limits 400 mm (16 in) travel linear air-bearing stage with linear motor and limits 500 mm (20 in) travel linear air-bearing stage with linear motor and limits Mounting and...

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ABL1500 Series ORDERING INFORMATION Linear Stages High-Accuracy Linear Encoders Options -SINGLE-CMS -XY-CMS High-accuracy linear encoder for ABL15005; amplified sine output High-accuracy linear encoder for ABL15010; amplified sine output High-accuracy linear encoder for ABL15020; amplified sine output High-accuracy linear encoder for ABL15030; amplified sine output High-accuracy linear encoder for ABL15040; amplified sine output High-accuracy linear encoder for ABL15050; amplified sine output Cable management system for single-axis applications Cable management system for X-Y assembly...

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