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PINNACLE PLUS+ SERIES SINGLE MAGNETRON POWER SUPPLIES

PINNACLE PLUS+ SERIES SINGLE MAGNETRON POWER SUPPLIES
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PINNACLE PLUS+ SERIES SINGLE MAGNETRON POWER SUPPLIES - 1

PINNACLE PLUS+ SERIES SINGLE MAGNETRON POWER SUPPLIES LOWEST STORED ENERGY, FASTEST ARC RESPONSE, AND WIDEST FULL-POWER OPERATIONAL IMPEDANCE RANGE AVAILABLE Input Voltage 200/208, 400, or 480 VAC (all ±10%) Output Voltage 325 to 800V Efficiency >90% >87% HALO Power Factor >0.95 for loads > 2 kW >0.90 at full power for HALO ©2019 Advanced Energy Industries, Inc.

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PINNACLE PLUS+ SERIES SINGLE MAGNETRON POWER SUPPLIES - 2

PINNACLE PLUS+ SERIES Pinnacle Plus+ Series Single Magnetron Power Supplies The field-proven Pinnacle® Plus+ platform of pulsed DC power supplies delivers remarkable process consistency and control for significantly reduced variation and higher yields. This compact, versatile package offers the lowest stored energy, fastest arc response, and widest full-power operational impedance range in the industry. These unprecedented capabilities, combined with superior efficiency and the highest power factor available, deliver process benefits you can bank on.

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PINNACLE PLUS+ SERIES SINGLE MAGNETRON POWER SUPPLIES - 3

PINNACLE PLUS+ SERIES Product Highlights ■ Lowest operating and installed cost ■ Fastest arc response in industry — least arc damage ■ Configurable arc response ■ Maximum process efficiency ■ Precise process control ■ Compact, versatile package ■ Numerous display/control options ■ Safety/emissions compliant ■ Lowest stored energy — less than 1 mJ per 1 kW of output ■ No tap changes ■ 6.25:1 impedance range ■ Target conditioning cycle (TCC) — minimizes conditioning time for new targets ■ Output repeatability of ±0.1% ■ Joule mode — optimized energy delivery ■ Programmable limits for output...

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PINNACLE PLUS+ SERIES SINGLE MAGNETRON POWER SUPPLIES - 4

PINNACLE PLUS+ SERIES Fastest Arc Response in Industry — Least Arc Damage Pinnacle Plus+ series of pulsed DC power supplies store less than 1 mJ per 1 kW of output for the shortest arc recovery time in the industry. With a hard-arc detection time of <25 ps, they are approximately ten times faster than competing units. Process interruption is negligible. Hard arc shutdown from full power results in power interruption of less than 200 ps. Configurable Arc Response Sophisticated arc-handling capabilities enable you to easily program voltage trip level, delay to shutdown, and shutdown time to...

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PINNACLE PLUS+ SERIES SINGLE MAGNETRON POWER SUPPLIES - 5

PINNACLE PLUS+ SERIES Precise Process Control A variety of innovative features maximize process control: Joule mode enables you to set delivered energy during each process run and adjusts for ramp time and lost energy during arc events. User-selectable and programmable parameters put process control at your fingertips: ■ Selectable operation as a power, current, or voltage source ■ Programmable ramp/run recipes ■ Programmable process limits for output level as well as strike and process voltage 16-bit control circuitry enables the fastest, most accurate ramp-to-set point response in the...

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PINNACLE PLUS+ SERIES SINGLE MAGNETRON POWER SUPPLIES - 6

Regulatory Compliance Pinnacle units are CE marked and conform to Low Voltage Directive 73/23/EEC and Electromagnetic Compatibility Directive 89/366/ EEC — meeting EN55011 (emissions), EN61000-6-2 (immunity), and EN50178 (safety). Select units also carry NRTL certification. Product Specifications

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PINNACLE PLUS+ SERIES SINGLE MAGNETRON POWER SUPPLIES - 7

PINNACLE PLUS+ SERIES Mechanical Specifications Construction

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PINNACLE PLUS+ SERIES SINGLE MAGNETRON POWER SUPPLIES - 8

ABOUT ADVANCED ENERGY Advanced Energy (AE) has devoted more than three decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex semiconductor and industrial thin film plasma manufacturing processes, demanding high and low voltage applications, and temperature-critical thermal processes. With deep applications know-how and responsive service and support across the globe, AE builds...

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